Title:
MONOCRYSTALLINE MEMBER WITH STRESS LAYER FORMED IN INTERIOR AND MONOCRYSTALLINE SUBSTRATE PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2012/108056
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a monocrystalline member with a stress layer formed in the interior and a monocrystalline substrate production method capable of easily producing a relatively large and thin monocrystalline substrate. A laser beam is focused on the interior of the monocrystalline member from the surface (10t) on the irradiated side of the monocrystalline member in order to form an internal modified layer monocrystalline member (11) having a two-dimensional stress layer (13u) extending parallel to the surface (10t) and separated from the surface (10t).
Inventors:
KUNISHI YOSUKE (JP)
SUZUKI HIDEKI (JP)
MATSUO RIKA (JP)
IKENO JUNICHI (JP)
SUZUKI HIDEKI (JP)
MATSUO RIKA (JP)
IKENO JUNICHI (JP)
Application Number:
PCT/JP2011/052951
Publication Date:
August 16, 2012
Filing Date:
February 10, 2011
Export Citation:
Assignee:
SHINETSU POLYMER CO (JP)
UNIV SAITAMA NAT UNIV CORP (JP)
KUNISHI YOSUKE (JP)
SUZUKI HIDEKI (JP)
MATSUO RIKA (JP)
IKENO JUNICHI (JP)
UNIV SAITAMA NAT UNIV CORP (JP)
KUNISHI YOSUKE (JP)
SUZUKI HIDEKI (JP)
MATSUO RIKA (JP)
IKENO JUNICHI (JP)
International Classes:
H01L21/02; B23K26/40; B28D5/00; H01L21/268; H01L21/301; H01L21/304
Foreign References:
| JP2005294325A | 2005-10-20 | |||
| JP2009226457A | 2009-10-08 | |||
| JPH09331077A | 1997-12-22 | |||
| JP2011003624A | 2011-01-06 | |||
| JP2007142000A | 2007-06-07 | |||
| JP2009295973A | 2009-12-17 |
Attorney, Agent or Firm:
MIYOSHI, Hidekazu et al. (JP)
Hidekazu Miyoshi (JP)
Hidekazu Miyoshi (JP)
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Claims: