Title:
MORPHOLOGY AND SPECTROSCOPY OF NANOSCALE REGIONS USING X-RAYS GENERATED BY LASER PRODUCED PLASMA
Document Type and Number:
WIPO Patent Application WO2005094318
Kind Code:
A3
Abstract:
A system and method is disclosed for generation of a nanoplasma and/or nanofluorescence. The system includes an emissions source of soft x-rays. The emissions source can include a laser system as an energy source and target material that acts as a radiation source when illuminated by the laser system. The system further includes focusing optics particularly suited for manipulation of wavelengths associated with x-rays. The focusing optics can focus the x-rays onto a desired target so that a nanoplasma or nanofluorescent spot can be formed to have a diameter of less than 200nm. Radiation from the nanoplasma or nanofluorescent spot can be examined, for example using a spectrometer, in order to perform a highly-selective material analysis of the desired target. Other applications include using the nanoplasma for nanoablation and/or nanodeposition processes.
Inventors:
BLOOM SCOTT H (US)
RIEGER HARRY (US)
RIEGER HARRY (US)
Application Number:
PCT/US2005/010406
Publication Date:
December 07, 2006
Filing Date:
March 29, 2005
Export Citation:
Assignee:
JMAR RES INC (US)
BLOOM SCOTT H (US)
RIEGER HARRY (US)
BLOOM SCOTT H (US)
RIEGER HARRY (US)
International Classes:
G01N23/223; C23C16/18; C23C16/48; G01N23/207; G01N23/227; H01S3/10; H05G2/00
Foreign References:
| JPH08327794A | 1996-12-13 | |||
| US4916721A | 1990-04-10 | |||
| US5606588A | 1997-02-25 | |||
| US4058498A | 1977-11-15 | |||
| US20020141536A1 | 2002-10-03 | |||
| US6259764B1 | 2001-07-10 |
Other References:
FIEDOROWICZ H. ET AL.: "Investigation of soft X-ray emission from a gas puff target irradiated with a Nd: YAG laser", OPTICS COMMUNICATIONS, vol. 163, no. 1-3, 1 May 1999 (1999-05-01), pages 103 - 114, XP004165500
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