Title:
MOTION TABLE ACCELERATION SAFETY PROTECTION METHOD, AND APPARATUS
Document Type and Number:
WIPO Patent Application WO/2024/026952
Kind Code:
A1
Abstract:
A motion table acceleration safety protection method, and an apparatus. The method comprises: acquiring vertical acceleration data and height data of a motion table (S102); according to the vertical acceleration data and the height data, determining whether the following limiting conditions are simultaneously met: a sustained acceleration limiting condition, an absolute acceleration limiting condition, and a height limiting condition (S104); and if yes, triggering motion table acceleration protection (S106). Whilst the acceleration protection sensitivity is ensured, the reliability of acceleration checkers is ensured and the possibility of false triggering is reduced, providing necessary conditions for the safe and stable operation of lithography machines.
Inventors:
ZHANG CHUNYAO (CN)
DUAN HONGYU (CN)
DUAN HONGYU (CN)
Application Number:
PCT/CN2022/115026
Publication Date:
February 08, 2024
Filing Date:
August 26, 2022
Export Citation:
Assignee:
BEIJING U PREC TECH CO LTD (CN)
BEIJING UNITED VICTORY PRECISION TECH CO LTD (CN)
BEIJING UNITED VICTORY PRECISION TECH CO LTD (CN)
International Classes:
G03F7/20; G01D21/02
Foreign References:
| JP2005273904A | 2005-10-06 | |||
| CN210922986U | 2020-07-03 | |||
| CN105739245A | 2016-07-06 | |||
| CN107290932A | 2017-10-24 | |||
| JPH06181158A | 1994-06-28 |
Attorney, Agent or Firm:
BEIJING HUIYINGJIECHUANG INTELLECTUAL PROPERTY AGENCY (CN)
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