Title:
MOUNT, HEATER COMPRISING THE MOUNT, AND DEPOSITION APPARATUS COMPRISING THE HEATER
Document Type and Number:
WIPO Patent Application WO/2019/093657
Kind Code:
A1
Abstract:
A mount may comprise: a body that is fixed to an end part of a hollow shaft supporting a heater plate; a gas supply hole that is arranged so as to penetrate the body, and that is for supplying inactive gas to the inside of the shaft in order to prevent oxidation of an area where a heating element of the heater plate and a power line for applying current to the heating element are coupled together, and to cool the heater plate; a gas discharge hole that is arranged so as to penetrate the body, and that is for discharging the inactive gas from the inside of the shaft.
Inventors:
JUNG CHUL HO (KR)
LEE BUM SUL (KR)
LEE BUM SUL (KR)
Application Number:
PCT/KR2018/011803
Publication Date:
May 16, 2019
Filing Date:
October 08, 2018
Export Citation:
Assignee:
MICO LTD (KR)
International Classes:
H01L21/67; C23C16/44; H01J37/32; H01L21/687
Foreign References:
| KR20110049867A | 2011-05-12 | |||
| KR100260119B1 | 2000-07-01 | |||
| US5859408A | 1999-01-12 | |||
| KR20040107699A | 2004-12-23 | |||
| JP2010283364A | 2010-12-16 |
Attorney, Agent or Firm:
LEE, Dong Gun (KR)
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