Title:
MOUNTING CLAMP FOR CARRIER RING FOR WAFER
Document Type and Number:
WIPO Patent Application WO/2022/083181
Kind Code:
A1
Abstract:
A mounting clamp for a carrier ring (100) for a wafer (105), the carrier ring comprising a circular ring portion (101), a threaded member (103) and a plurality of fixing bases (102), the circular ring portion comprising a ring body (1011) and a plurality of lugs (1012) each provided with an unthreaded hole (10120), and the fixing base being provided with a threaded hole (1020), to which the threaded member is connected in a threaded manner after passing through the unthreaded hole. The mounting clamp comprises a first clamp body (1) and a second clamp body (2), wherein the first clamp body is provided with a first circular hole portion (11) and a first recess portion (12); the first circular hole portion has a diameter greater than or equal to the outer diameter of the ring body; the first recess portion extends from the inner wall of the first circular hole portion to the outer side of the first clamp body; when the ring body is located at the first circular hole portion, the first recess portion can clamp the lug; the second clamp body is provided with a second recess portion (21) penetrating the second clamp body; and when the first recess portion clamps the lug, the fixing base can penetrate into the second recess portion, the central axes of the threaded hole and the unthreaded hole coincide with each other, and the fixing base can penetrate out of the first recess portion.
Inventors:
XIA ZHI (CN)
Application Number:
PCT/CN2021/105755
Publication Date:
April 28, 2022
Filing Date:
July 12, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
B25B11/02; C23C16/458; H01L21/673; H01L21/683
Foreign References:
| TWM315405U | 2007-07-11 | |||
| CN202189772U | 2012-04-11 | |||
| CN1879014A | 2006-12-13 | |||
| CN1349656A | 2002-05-15 | |||
| CN104282603A | 2015-01-14 | |||
| US6100505A | 2000-08-08 | |||
| CN202805002U | 2013-03-20 | |||
| TWM493744U | 2015-01-11 | |||
| JPS593935B2 | 1984-01-26 |
Attorney, Agent or Firm:
BOXIN CHINA INTELLECTUAL PROPERTY (CN)
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