Title:
MOUNTING DEVICE, AND METHOD FOR DETECTING PARALLELISM IN MOUNTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/024291
Kind Code:
A1
Abstract:
A method for detecting parallelism in a mounting device, the method including: a first height detection step in which a triangular pin (41) is placed on a placement surface (12) of a stage (10), a mounting tool (22) is lowered, and a first height (HA1, HA2) of the mounting tool (22) when a holding surface (23) has contacted a distal end (42) of the triangular pin (41) is detected; a second height detection step in which the triangular pin (41) is held by the holding surface (23) of the mounting tool (22), the mounting tool (22) is lowered, and a second height (HA2, HB2) of the mounting tool (22) when the distal end (42) of the triangular pin (41) has contacted the placement surface (12) is detected; and a parallelism calculation step in which the parallelism between the placement surface (12) of the stage (10) and the holding surface (23) of the mounting tool (22) is calculated on the basis of the first height (HA, HB1) and the second height (HA2, HB2).
Inventors:
NOGUCHI YUICHIRO (JP)
DZHANGIROV ALEXANDER (JP)
DZHANGIROV ALEXANDER (JP)
Application Number:
PCT/JP2020/029216
Publication Date:
February 03, 2022
Filing Date:
July 30, 2020
Export Citation:
Assignee:
SHINKAWA KK (JP)
International Classes:
H01L21/52; G01B5/24; H01L21/60; H01L21/603; H05K13/08
Foreign References:
| JP2014017328A | 2014-01-30 | |||
| JP2016139629A | 2016-08-04 | |||
| JP2010114102A | 2010-05-20 | |||
| JPH0476931A | 1992-03-11 | |||
| JPH0476930A | 1992-03-11 | |||
| US20050061852A1 | 2005-03-24 |
Attorney, Agent or Firm:
YKI INTELLECTUAL PROPERTY ATTORNEYS (JP)
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