MOUNTING PORT AND MOUNTING PORT OPENING/CLOSING METHOD

Title:

MOUNTING PORT AND MOUNTING PORT OPENING/CLOSING METHOD

Document Type and Number:

WIPO Patent Application WO/2014/038301

Kind Code:

A1

Abstract:

Provided is a mounting port that generates few particles and is equipped with shutters having a simple opening/closing structure. This mounting port relays articles between a transfer device or a processing device and an operator in a cleanroom. The mounting port is equipped with: a platform for articles; a device-side opening for enabling the transport device or the processing device to pass the articles to and from the platform; an aisle-side opening facing the operator aisle; shutters provided at the position where the device-side opening is opened/closed and comprising arc-shaped plates or plates which are bent in an arc shape; and a rotation mechanism that rotates the shutters around prescribed axes, between a state wherein the device-side opening is open and a state wherein it is closed.

Inventors:

OGO HARUKI (JP)
SHIMADA HIROYUKI (JP)

Application Number:

PCT/JP2013/069914

Publication Date:

March 13, 2014

Filing Date:

July 23, 2013

Export Citation:

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Assignee:

MURATA MACHINERY LTD (JP)

International Classes:

H01L21/677; B65G1/00

Foreign References:

JP2008254897A	2008-10-23
JPS4973163U	1974-06-25
JPH0323513Y2	1991-05-22
JP2007113287A	2007-05-10
JP3650670B2	2005-05-25
JP4185818B2	2008-11-26
JPH10114423A	1998-05-06
JP4185818B2	2008-11-26

Other References: