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Patent Searching and Data


Title:
MOUNTING PORT AND MOUNTING PORT OPENING/CLOSING METHOD
Document Type and Number:
WIPO Patent Application WO/2014/038301
Kind Code:
A1
Abstract:
Provided is a mounting port that generates few particles and is equipped with shutters having a simple opening/closing structure. This mounting port relays articles between a transfer device or a processing device and an operator in a cleanroom. The mounting port is equipped with: a platform for articles; a device-side opening for enabling the transport device or the processing device to pass the articles to and from the platform; an aisle-side opening facing the operator aisle; shutters provided at the position where the device-side opening is opened/closed and comprising arc-shaped plates or plates which are bent in an arc shape; and a rotation mechanism that rotates the shutters around prescribed axes, between a state wherein the device-side opening is open and a state wherein it is closed.

Inventors:
OGO Haruki (Inuyama Plant, 2, Aza-Nakajima, Oaza-Hashizume, Inuyama-sh, Aichi 02, 〒4848502, JP)
SHIMADA Hiroyuki (Inuyama Plant, 2, Aza-Nakajima, Oaza-Hashizume, Inuyama-sh, Aichi 02, 〒4848502, JP)
Application Number:
JP2013/069914
Publication Date:
March 13, 2014
Filing Date:
July 23, 2013
Export Citation:
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Assignee:
MURATA MACHINERY, LTD. (3 Minami Ochiai-cho, Kisshoin Minami-ku, Kyoto-sh, Kyoto 26, 〒6018326, JP)
International Classes:
H01L21/677; B65G1/00
Foreign References:
JP2008254897A2008-10-23
JPS4973163U1974-06-25
JPH0323513Y21991-05-22
JP2007113287A2007-05-10
JP3650670B22005-05-25
JP4185818B22008-11-26
JPH10114423A1998-05-06
JP4185818B22008-11-26
Other References:
See also references of EP 2894663A4
Attorney, Agent or Firm:
SHIOIRI Akira et al. (4-1-503, Narihira-cho Ashiya-sh, Hyogo 68, 〒6590068, JP)
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