Title:
MOUNTING TABLE AND ELECTRODE MEMBER
Document Type and Number:
WIPO Patent Application WO/2020/017387
Kind Code:
A1
Abstract:
Provided is a mounting table on which a to-be-processed object and an edge ring are to be mounted, the mounting table being provided with: a first flow channel and a second flow channel for allowing a fluid to flow therethrough within the mounting table; a bifurcation part which connects an inlet of the first flow channel and an inlet of the second flow channel; a confluence part which connects an outlet of the first flow channel and an outlet of the second flow channel; and a member which is disposed at the bifurcation part and/or the confluence part and which has an opening that connects the first flow channel and the second flow channel.
Inventors:
HAYASHI DAISUKE (JP)
ISHIKAWA SHINYA (JP)
ISHIKAWA SHINYA (JP)
Application Number:
PCT/JP2019/027041
Publication Date:
January 23, 2020
Filing Date:
July 08, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/3065; C23C14/50; C23C16/458; C23C16/46; H01L21/683
Foreign References:
| JP2008187063A | 2008-08-14 | |||
| JP2013161522A | 2013-08-19 | |||
| JP2011035201A | 2011-02-17 | |||
| JP2018110216A | 2018-07-12 | |||
| JP2004259829A | 2004-09-16 | |||
| JP2000216140A | 2000-08-04 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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