Title:
MOUNTING TABLE VIBRATION SUPPRESSION DEVICE, AND MOUNTING TABLE VIBRATION SUPPRESSION METHOD
Document Type and Number:
WIPO Patent Application WO/2011/155544
Kind Code:
A1
Abstract:
The vibration of a mounting table caused by equipment mounted on the mounting table being moved is suppressed. A vibration suppression device (10) is provided with a fixing member (14). The fixing member (14) is affixed to a mounting table (12) mounted with equipment and supported by a mount by means of a vibration absorption means. The fixing member (14) has a flat center section (14C) and is affixed to the mounting table (12) by means of perpendicular sections (14E) formed by bending both ends of center section (14C). A clamping means (54) is disposed on both ends of center section (14C). The clamping means (54) has an upper leaf spring (20) and a lower leaf spring (22). The upper leaf spring (20) is affixed to center section (18C) of an upper leaf spring attachment base (18), and the lower leaf spring (22) is attached to an attachment base (17) disposed on the mount. Center section (18C) is inserted into a space surrounded by the fixing member (14) and the mounting table (12) and is attached to the attachment base (17) by means of leg sections formed by bending both ends of center section (18C). An actuator (24) for transforming the lower leaf spring (22) is attached to the lower leaf spring (22).
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Inventors:
MATSUSHITA, Hitoshi (TAKENAKA CORPORATION 5-1,Ohtsuka 1-chome, Inzai-sh, Chiba 95, 〒2701395, JP)
松下 仁士 (〒95 千葉県印西市大塚１丁目５番地１ 株式会社竹中工務店 技術研究所内 Chiba, 〒2701395, JP)
YOSHIOKA, Hirokazu (TAKENAKA CORPORATION 5-1,Ohtsuka 1-chome, Inzai-sh, Chiba 95, 〒2701395, JP)
松下 仁士 (〒95 千葉県印西市大塚１丁目５番地１ 株式会社竹中工務店 技術研究所内 Chiba, 〒2701395, JP)
YOSHIOKA, Hirokazu (TAKENAKA CORPORATION 5-1,Ohtsuka 1-chome, Inzai-sh, Chiba 95, 〒2701395, JP)
Application Number:
JP2011/063179
Publication Date:
December 15, 2011
Filing Date:
June 08, 2011
Export Citation:
Assignee:
TAKENAKA CORPORATION (1-13, Hommachi 4-chome Chuo-ku, Osaka-sh, Osaka 53, 〒5410053, JP)
株式会社竹中工務店 (〒53 大阪府大阪市中央区本町４丁目１番１３号 Osaka, 〒5410053, JP)
MATSUSHITA, Hitoshi (TAKENAKA CORPORATION 5-1,Ohtsuka 1-chome, Inzai-sh, Chiba 95, 〒2701395, JP)
松下 仁士 (〒95 千葉県印西市大塚１丁目５番地１ 株式会社竹中工務店 技術研究所内 Chiba, 〒2701395, JP)
株式会社竹中工務店 (〒53 大阪府大阪市中央区本町４丁目１番１３号 Osaka, 〒5410053, JP)
MATSUSHITA, Hitoshi (TAKENAKA CORPORATION 5-1,Ohtsuka 1-chome, Inzai-sh, Chiba 95, 〒2701395, JP)
松下 仁士 (〒95 千葉県印西市大塚１丁目５番地１ 株式会社竹中工務店 技術研究所内 Chiba, 〒2701395, JP)
International Classes:
F16F15/02; B23Q11/00; H01L41/08; H01L41/09; H01L41/187
Attorney, Agent or Firm:
NAKAJIMA, Jun et al. (TAIYO, NAKAJIMA & KATO Seventh Floor, HK-Shinjuku Bldg., 3-17, Shinjuku 4-chome, Shinjuku-k, Tokyo 22, 〒1600022, JP)
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Claims: