Title:
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2010/032878
Kind Code:
A3
Abstract:
In measurement of a positional information in the XY plane of a fine movement stage (WFS) held by a coarse movement stage(WCS), an encoder system is used including a head which is placed facing a grating (RG) placed on a surface substantially parallel to the XY plane of the fine movement stage and irradiates a measurement beam on the grating. Then, the fine movement stage is driven individually or integrally with the coarse movement stage by a drive system, based on the positional information measured by the encoder system. In this case, the head of the encoder system can be placed in proximity to the fine movement stage (the grating), which allows a highly precise measurement of the positional information of the fine movement stage by the encoder system.
Inventors:
SHIBAZAKI YUICHI (JP)
Application Number:
PCT/JP2009/066848
Publication Date:
June 17, 2010
Filing Date:
September 18, 2009
Export Citation:
Assignee:
NIPPON KOGAKU KK (JP)
SHIBAZAKI YUICHI (JP)
SHIBAZAKI YUICHI (JP)
International Classes:
G03F7/20
Foreign References:
| US20060101928A1 | 2006-05-18 | |||
| EP1796144A1 | 2007-06-13 | |||
| US20080094594A1 | 2008-04-24 | |||
| US20070035267A1 | 2007-02-15 | |||
| US20080074681A1 | 2008-03-27 | |||
| US20070267995A1 | 2007-11-22 |
Attorney, Agent or Firm:
TATEISHI, Atsuji (Karakida Center Bldg. 1-53-9, Karakida, Tama-sh, Tokyo 35, JP)
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