Title:
MOVABLE BODY DEVICE, DISPLACEMENT METHOD, EXPOSURE DEVICE, EXPOSURE METHOD, FLAT-PANEL DISPLAY MANUFACTURING METHOD, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/062491
Kind Code:
A1
Abstract:
This movable body device for moving a substrate (P) is provided with: a substrate holder (32) which holds the substrate (P) and which can move in the X axis and the Y axis directions; a Y coarse movement stage (24) which can move in the Y axis direction; a first measurement system which acquires position information of the substrate holder (32) by means of heads (74x, 74y) provided on the substrate holder (32) and a scale (72) provided on the Y coarse movement stage (24); a second measurement system which acquires position information of the Y coarse movement stage (24) by means of heads (80x, 80y) provided on the Y coarse movement stage (24) and a scale (78); and a control system which controls the position of the substrate holder (32) on the basis of position information acquired by the first and second measurement systems. The first measurement system irradiates a measurement beam while moving the heads (74x, 74y) in the X axis direction with respect to the scale (72), and the second measurement system irradiates a measurement beam while moving the heads (80x, 80y) in the Y axis direction with respect to the scale (78).
Inventors:
AOKI YASUO (JP)
Application Number:
PCT/JP2017/035494
Publication Date:
April 05, 2018
Filing Date:
September 29, 2017
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G03F7/20; G01B11/00; G03F7/22; G03F9/00; H01L21/68
Domestic Patent References:
| WO2010122788A1 | 2010-10-28 |
Foreign References:
| JP2014057082A | 2014-03-27 | |||
| JP2010272867A | 2010-12-02 |
Attorney, Agent or Firm:
TATEISHI, Atsuji (JP)
Download PDF: