Title:
MOVABLE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2007/110928
Kind Code:
A1
Abstract:
A movable element which can achieve miniaturization of submicron level, high speed operation, simplification of fabrication process, cost reduction, and high reliability simultaneously. The movable element has a basic structure comprising a lower electrode and a basic conductive layer secured onto a substrate, respectively, an elastic shaft of carbon nanotube standing with the lower end secured onto the basic conductive layer, and an upper structural body including an upper electrode secured to the upper end of the elastic shaft while spaced apart from the lower electrode, wherein the upper electrode is displaced from the lower electrode by Coulomb force acting between the both electrodes within an allowable range of elastic deformation of the elastic shaft.
Inventors:
NAKAMURA SHUNJI (JP)
Application Number:
PCT/JP2006/306270
Publication Date:
October 04, 2007
Filing Date:
March 28, 2006
Export Citation:
Assignee:
FUJITSU LTD (JP)
NAKAMURA SHUNJI (JP)
NAKAMURA SHUNJI (JP)
International Classes:
B81B3/00
Foreign References:
| JP2006041911A | 2006-02-09 | |||
| JP2004001186A | 2004-01-08 | |||
| JP2002287045A | 2002-10-03 | |||
| JP2000171481A | 2000-06-23 | |||
| JPH04251579A | 1992-09-07 | |||
| JP2005262382A | 2005-09-29 | |||
| JP2003225896A | 2003-08-12 | |||
| JP2005166622A | 2005-06-23 | |||
| JP2005262412A | 2005-09-29 | |||
| JP2005223409A | 2005-08-18 |
Attorney, Agent or Firm:
AOKI, Atsushi et al. (ISHIDA & ASSOCIATESToranomon 37 Mori Bldg.,5-1, Toranomon 3-chom, Minato-ku Tokyo 23, JP)
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