Title:
MOVING BODY DRIVE METHOD, MOVING BODY DRIVE SYSTEM, PATTERN FORMATION METHOD, PATTERN FORMATION DEVICE, EXPOSURE METHOD, EXPOSURE DEVICE, AND DEVICE FABRICATION METHOD
Document Type and Number:
WIPO Patent Application WO/2007/083758
Kind Code:
A1
Abstract:
Y-direction position information on a moving body (RST) is measured by using
a interferometer (16y) and encoders ((24A, 26A1), (24B, 26B1)
having an excellent short-period stability as compared to the interferometer.
According to the measurement result, a predetermined calibration operation
is executed to acquire correction information for correcting the measurement
value of the encoders. Thus, it is possible to acquire correction information
for correcting the measurement value of the encoders having an excellent short-period
stability of the measurement value as compared to the interferometer. According
to the measurement value of the encoders and the correction information, the
moving body is accurately driven in the Y-axis direction.
Inventors:
SHIBAZAKI YUICHI (JP)
Application Number:
PCT/JP2007/050821
Publication Date:
July 26, 2007
Filing Date:
January 19, 2007
Export Citation:
Assignee:
NIKON CORP (JP)
SHIBAZAKI YUICHI (JP)
SHIBAZAKI YUICHI (JP)
International Classes:
H01L21/027; G01B11/00; G03F9/00; G12B5/00; H01L21/68
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Other References:
See also references of EP 1983555A4
Attorney, Agent or Firm:
TATEISHI, Atsuji (Karakida Center Bldg., 1-53-9, Karakida, Tama-sh, Tokyo35, JP)
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