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Title:
MTF MEASUREMENT DEVICE AND MTF MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2018/207400
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide an MTF measurement device and MTF measurement method that make it possible to measure the MTF of an optical device for light of all wavelengths. An MTF measurement device (100) for measuring the MTF of an optical device has a test chart (105) having formed thereon a test pattern having a light blocking area and a light transmitting area, a light source (101) for irradiating light onto the test chart, a wavelength selection unit (102) for selecting the wavelength of the light emitted from the light source, and a calculation device (107) for calculating the MTF using the output signal of a converter (solid-state imaging element 10) for subjecting the light emitted from the test chart to photoelectric conversion. The wavelength selection unit (102) has a dispersion element (diffraction grating 108) for dispersing the light emitted from the light source (101) and extracting light of a specific wavelength and an adjustment mechanism (rotation mechanism 109) for changing the angle of incidence of the light incident on the dispersion element (diffraction grating 108).

Inventors:
OTA YASUAKI (JP)
Application Number:
PCT/JP2017/045891
Publication Date:
November 15, 2018
Filing Date:
December 21, 2017
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G01M11/02; G01J3/06
Foreign References:
JP2003279446A2003-10-02
JP2010160025A2010-07-22
JP2011186452A2011-09-22
JP2015078989A2015-04-23
JP2009264894A2009-11-12
JP2010210507A2010-09-24
US5959726A1999-09-28
JP2017096889A2017-06-01
Attorney, Agent or Firm:
SAMEJIMA, Mutsumi et al. (JP)
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