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Title:
MULTI-ACTIVE-REGION SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/130711
Kind Code:
A1
Abstract:
A multi-active-region semiconductor structure and a manufacturing method therefor. The multi-active-region semiconductor structure comprises: a (2k-1)th common confinement layer which is located between a kth active layer and a kth tunnel junction and is in contact with the kth tunnel junction, and a (2k)th common confinement layer which is located between a (k+1)th active layer and the kth tunnel junction and is in contact with the kth tunnel junction; the forbidden band width of a kth quantum well layer is smaller than the forbidden band width of a kth first semiconductor layer and the forbidden band width of a kth second semiconductor layer; the total thickness of the (2k-1)th common confinement layer and the (2k)th common confinement layer is greater than the coupling thickness of a critical optical field and is less than or equal to two times of the coupling thickness of the critical optical field; and the thickness of the kth quantum well layer is less than or equal to 1/10 of the (2k-1)th common confinement layer, and the thickness of the kth quantum well layer is less than or equal to 1/10 of the (2k)th common confinement layer. The light-emitting efficiency of the multi-active-region semiconductor structure is effectively improved, and optical field crosstalk is reduced.

Inventors:
WANG JUN (CN)
GOU YUDAN (CN)
ZHOU LI (CN)
CHENG YANG (CN)
TAN SHAOYANG (CN)
ZHANG LICHEN (CN)
LI BO (CN)
HU YIWEN (CN)
MIN DAYONG (CN)
Application Number:
PCT/CN2022/106858
Publication Date:
July 13, 2023
Filing Date:
July 20, 2022
Export Citation:
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Assignee:
SUZHOU EVERBRIGHT PHOTONICS CO LTD (CN)
EVERBRIGHT INST OF SEMICONDUCTOR PHOTONICS CO LTD (CN)
International Classes:
H01S5/343; H01S5/34
Foreign References:
CN114006268A2022-02-01
CN110880676A2020-03-13
CN112531051A2021-03-19
CN1588717A2005-03-02
CN103078252A2013-05-01
US20070145388A12007-06-28
Attorney, Agent or Firm:
SUNSHINE INTELLECTUAL PROPERTY INTERNATIONAL CO., LTD. (CN)
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