Title:
MULTI-AXIS MICROMACHINED ACCELEROMETER
Document Type and Number:
WIPO Patent Application WO2007021399
Kind Code:
B1
Abstract:
Multi-axis micromachined accelerometer which, in some disclosed embodiments, has a proof mass suspended above a substrate for movement in response to acceleration along first and second axes, a first detection electrode connected to the proof mass and constrained for movement only along the first axis, and a second detection electrode connected to the proof mass and constrained for movement only along the second axis. In another embodiment, the proof mass is also movable in response to acceleration along a third axis which is perpendicular to the substrate, and a third detection electrode is mounted on the substrate beneath the proof mass for detecting movement of the proof mass in response to acceleration along the third axis. In other embodiments, two proof masses are mounted above a substrate for torsional movement about an axis perpendicular to the substrate in response to acceleration along a first axis and for rotational movement about a second axis parallel to the substrate in response to acceleration along second axis perpendicular to the substrate, a first detector having input electrodes connected to the proof masses and constrained for movement only along the first axis for detecting acceleration along the first axis, and detection electrodes mounted on the substrate beneath the proof masses for detecting rotational movement of the proof masses and acceleration along the second axis.
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Inventors:
ACAR CENK (US)
Application Number:
PCT/US2006/026732
Publication Date:
January 10, 2008
Filing Date:
July 11, 2006
Export Citation:
Assignee:
BEI TECHNOLOGIES INC (US)
ACAR CENK (US)
ACAR CENK (US)
International Classes:
G01P15/125; G01P15/18
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