Title:
MULTI-CANTILEVER BEAM STRUCTURE OF PROBE CARD AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2012/011629
Kind Code:
A1
Abstract:
The present invention relates a multi-cantilever beam structure and a manufacturing method therefor, the multi-cantilever beam structure comprising: a stereobate part which is formed on a substrate member of a probe card;a lower beam which has one end fixed on the upper surface of the stereobate part and is extended in the lateral direction; support parts formed on both ends of the lower beam; support parts formed on both ends of the lower beam;
an upper beam which has both ends fixed on the support parts, respectively, and is configured to have a structure parallel to the lower beam at regular intervals in the upward and downward direction; and a probe tip which is formed to vertically protrude from another end of the upper beam to be electrically connected to a semiconductor wafer, wherein the stereobate part, lower beam, support parts, upper beam, and probe tip are formed on a space transformer in an MEMS scheme. According to this manufacturing method, the multi-cantilever beam is three-dimensionally formed on the space transformer through the MEMS scheme, which makes it possible to control the angle of a two-step beam such that the distance between beams becomes wider while the gap between probe tips becomes narrower.
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Inventors:
CHO, Byung Ho (8 Byucksan Garden Ville, 90-16 Jung-dong, Giheung-gu, Yongin-si, Gyeonggi-do 449-916, 449-916, KR)
조병호 (경기도 용인시 기흥구 중동 90-16 벽산가든빌 8호, 449-916 Gyeonggi-do, 449-916, KR)
CHO, Yong Ho (1003-203, Manhyeong Maeul Hyundai I-Park Apt. 10-Danji. #857 Sanghyeon-dong, Suji-gu, Yongin-si, Gyeonggi-do 448-130, 448-130, KR)
조용호 (경기도 용인시 수지구 상현동 857 만현마을 10단지 현대아이파크 1003-203, 448-130 Gyeonggi-do, 448-130, KR)
조병호 (경기도 용인시 기흥구 중동 90-16 벽산가든빌 8호, 449-916 Gyeonggi-do, 449-916, KR)
CHO, Yong Ho (1003-203, Manhyeong Maeul Hyundai I-Park Apt. 10-Danji. #857 Sanghyeon-dong, Suji-gu, Yongin-si, Gyeonggi-do 448-130, 448-130, KR)
조용호 (경기도 용인시 수지구 상현동 857 만현마을 10단지 현대아이파크 1003-203, 448-130 Gyeonggi-do, 448-130, KR)
Application Number:
KR2010/005906
Publication Date:
January 26, 2012
Filing Date:
September 01, 2010
Export Citation:
Assignee:
MICROFRIEND INC. (10F Seoul Technopark, #172 Gongneung-dong, Nowon-gu, Seoul 139-240, 139-240, KR)
(주) 마이크로프랜드 (서울특별시 노원구 공릉동 172 서울테크노파크 10층, 139-240 Seoul, 139-240, KR)
CHO, Byung Ho (8 Byucksan Garden Ville, 90-16 Jung-dong, Giheung-gu, Yongin-si, Gyeonggi-do 449-916, 449-916, KR)
조병호 (경기도 용인시 기흥구 중동 90-16 벽산가든빌 8호, 449-916 Gyeonggi-do, 449-916, KR)
CHO, Yong Ho (1003-203, Manhyeong Maeul Hyundai I-Park Apt. 10-Danji. #857 Sanghyeon-dong, Suji-gu, Yongin-si, Gyeonggi-do 448-130, 448-130, KR)
(주) 마이크로프랜드 (서울특별시 노원구 공릉동 172 서울테크노파크 10층, 139-240 Seoul, 139-240, KR)
CHO, Byung Ho (8 Byucksan Garden Ville, 90-16 Jung-dong, Giheung-gu, Yongin-si, Gyeonggi-do 449-916, 449-916, KR)
조병호 (경기도 용인시 기흥구 중동 90-16 벽산가든빌 8호, 449-916 Gyeonggi-do, 449-916, KR)
CHO, Yong Ho (1003-203, Manhyeong Maeul Hyundai I-Park Apt. 10-Danji. #857 Sanghyeon-dong, Suji-gu, Yongin-si, Gyeonggi-do 448-130, 448-130, KR)
International Classes:
H01L21/66
Attorney, Agent or Firm:
KIM, Won-Sik (4fl. Garion Bldg, 895-1 Daechi-dong, Gangnam-gu, Seoul 135-280, 135-280, KR)
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