Title:
MULTI-CHANNEL PARALLEL SUPER-RESOLUTION LASER DIRECT WRITING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/070991
Kind Code:
A1
Abstract:
A multi-channel parallel super-resolution laser direct writing system, capable of doubling the speed of a traditional single-channel laser direct writing printing system, comprising a first laser (1) used for generating a direct writing path light beam, a second laser (2) used for generating a suppression path light beam, at least one direct writing-suppression light beam combination unit (3), a secondary beam combination module (4), and an inscribing module (5). The direct writing path light beam and the suppression path light beam are simultaneously incident to the direct writing-suppression light beam combination unit (3) to form a pair of direct writing-suppression light beam combinations, and then sequentially pass through the secondary beam combination module (4) and the inscribing module (5) to form a direct writing-suppression light spot combination.
Inventors:
KUANG CUIFANG (CN)
SUN QIUYUAN (CN)
XU LIANG (CN)
DING CHENLIANG (CN)
ZHU DAZHAO (CN)
LIU XU (CN)
MA CHENGPENG (CN)
YANG ZHENYAO (CN)
SUN QIUYUAN (CN)
XU LIANG (CN)
DING CHENLIANG (CN)
ZHU DAZHAO (CN)
LIU XU (CN)
MA CHENGPENG (CN)
YANG ZHENYAO (CN)
Application Number:
PCT/CN2022/076330
Publication Date:
May 04, 2023
Filing Date:
February 15, 2022
Export Citation:
Assignee:
ZHEJIANG LAB (CN)
UNIV ZHEJIANG (CN)
UNIV ZHEJIANG (CN)
International Classes:
G03F7/20
Foreign References:
| CN113985706A | 2022-01-28 | |||
| CN112363322A | 2021-02-12 | |||
| CN113189846A | 2021-07-30 | |||
| CN111879737A | 2020-11-03 | |||
| CN113189848A | 2021-07-30 | |||
| CN112068400A | 2020-12-11 | |||
| KR20130100490A | 2013-09-11 | |||
| KR20050080059A | 2005-08-11 | |||
| CN109283805A | 2019-01-29 |
Attorney, Agent or Firm:
HANGZHOU QIUSHI PATENT OFFICE CO., LTD. (CN)
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