Title:
MULTI-CHIP MODULE INTEGRATING MEMS MIRROR ARRAY WITH ELECTRONICS
Document Type and Number:
WIPO Patent Application WO2003042094
Kind Code:
A3
Abstract:
An integrated module including an array of electrostatically actuated mirrors usable as an optical switch. An array of tiltable mirrors (70, 72) is formed as a micro electromechanical system (MEMS) in one substrate carrier (60). A ceramic multi-chip module (MCM) (62) is formed having multiple layers (80) of wiring and electrodes (94) at one surface forming one side part of the electrostatic capacitive actuators. The MEMS substrate is bonded to the carrier (62) with the carrier electrodes (94) in opposition to the mirrors (70, 72), which form counter electrodes. Advantageously, a handle layer of the MEMS substrate is not removed and the mirrors released until after the bonding with the MCM. Separate high-voltage integrated circuits (ICs) (66) driving the actuators and low-voltage ICs controlling the high-voltage ICs (66) are bonded on the side of the MCM (62) opposite the MEMS (60) with the MCM providing electrical interconnections (68).
More Like This:
Inventors:
BHATTARAI AMAL
RAJAN NARAYANAN
RAJAN NARAYANAN
Application Number:
PCT/US2002/035890
Publication Date:
February 12, 2004
Filing Date:
November 07, 2002
Export Citation:
Assignee:
MOVAZ NETWORKS INC (US)
International Classes:
B81B7/00; B81B7/02; B81B7/04; G02B26/08; (IPC1-7): B81B7/04; B81B7/00; B81B7/02
Domestic Patent References:
| WO2001080593A2 | 2001-10-25 | |||
| WO2001033293A1 | 2001-05-10 |
Foreign References:
| EP1162169A2 | 2001-12-12 | |||
| US5761350A | 1998-06-02 | |||
| US5610625A | 1997-03-11 | |||
| EP1093004A2 | 2001-04-18 |
Other References:
BUTLER J T ET AL: "Multichip module packaging of microelectromechanical systems", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 70, no. 1-2, 1 October 1998 (1998-10-01), pages 15 - 22, XP004140106, ISSN: 0924-4247
TUANTRANONT A ET AL: "Optical beam steering using MEMS-controllable microlens array", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 91, no. 3, 15 July 2001 (2001-07-15), pages 363 - 372, XP004255490, ISSN: 0924-4247
MICHALICEK M A ET AL: "Flip-chip fabrication of advanced micromirror arrays", PROCEEDINGS OF THE IEEE 14TH. ANNUAL INTERNATIONAL CONFERENCE ON MICROELECTRO MECHANICAL SYSTEMS, MEMS 2001, INTERLAKEN, SWITZERLAND, JAN. 21 - 25, 2001,, ISBN: 0-7803-5998-4, XP010534613
TUANTRANONT A ET AL: "Optical beam steering using MEMS-controllable microlens array", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 91, no. 3, 15 July 2001 (2001-07-15), pages 363 - 372, XP004255490, ISSN: 0924-4247
MICHALICEK M A ET AL: "Flip-chip fabrication of advanced micromirror arrays", PROCEEDINGS OF THE IEEE 14TH. ANNUAL INTERNATIONAL CONFERENCE ON MICROELECTRO MECHANICAL SYSTEMS, MEMS 2001, INTERLAKEN, SWITZERLAND, JAN. 21 - 25, 2001,, ISBN: 0-7803-5998-4, XP010534613
Download PDF: