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Title:
MULTI-COLUMN ELECTRON BEAM EXPOSURE DEVICE
Document Type and Number:
WIPO Patent Application WO/2006/104139
Kind Code:
A1
Abstract:
[PROBLEMS] To provide a multi-column electron beam exposure device capable of performing accurate exposure by eliminating fluctuation of exposure electron beam in each column cell. [MEANS FOR SOLVING PROBLEMS] A multi-column electron beam exposure device includes: a plurality of column cells arranged on a single wafer and having an electron gun, deflection means for deflecting the electron beam applied by the electron gun, and exposure data reception means for receiving exposure data; and correction calculation means (40) for calculating the exposure data used in each of the column cells. The correction calculation means (40) has exposure data control means (45) and exposure data transmission means (46) for each of the column cells. The exposure data transmission means (46) encodes the exposure data corrected by the exposure data control means (45) and converts it into serial data, which is further converted into an optical signal and transmitted. The exposure data reception means (61) converts the optical signal into an electric signal, decodes the encoded exposure data, and converts it into parallel data.

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Inventors:
YABARA HIDEFUMI (JP)
MIYAZAWA KENICHI (JP)
SAKAZAKI TOMOHIRO (JP)
TANAKA KAZUAKI (JP)
Application Number:
PCT/JP2006/306271
Publication Date:
October 05, 2006
Filing Date:
March 28, 2006
Export Citation:
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Assignee:
ADVANTEST CORP (JP)
YABARA HIDEFUMI (JP)
MIYAZAWA KENICHI (JP)
SAKAZAKI TOMOHIRO (JP)
TANAKA KAZUAKI (JP)
International Classes:
H01L21/027; G03F7/20; H01J37/305
Domestic Patent References:
WO2000060632A22000-10-12
Foreign References:
JP2000036452A2000-02-02
JPH11329322A1999-11-30
JP2001126972A2001-05-11
JP2000173522A2000-06-23
JPH0582429A1993-04-02
JP2001126972A2001-05-11
JP2001073522A2001-03-21
US4837447A1989-06-06
US6218060B12001-04-17
Other References:
See also references of EP 1865538A4
Attorney, Agent or Firm:
Okamoto, Keizo (Yamanishi Bldg. 4F, 11-7, Nihonbashi Ningyo-cho 3-chom, Chuo-ku Tokyo 13, JP)
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