Title:
MULTI-FUNCTIONAL SAMPLE CHAMBER SYSTEM APPLICABLE TO ELECTRON MICROSCOPE, AND SIMULATION METHOD
Document Type and Number:
WIPO Patent Application WO/2024/060658
Kind Code:
A1
Abstract:
A multi-functional sample chamber system applicable to an electron microscope, and a simulation method. A simulation structure of the multi-functional sample chamber system is arranged in a chamber of a scanning electron microscope, and an internal chamber of the simulation structure is isolated from a vacuum chamber of the scanning electron microscope. By means of adjusting a simulation environment of the internal chamber of the simulation structure, and loading a sample made of a material of a relatively large size, real-time dynamic in-situ observation and data collection are performed on the sample without contact with the sample made of the material of a relatively large size, thus achieving whole-process detection of changes in properties of the sample made of the material of a relatively large size. The system has a simple structure, is convenient to use, is used for simulating an application environment of a material more realistically, and can implement whole-process microscopic detection on any tissue and in any condition. In addition, the structure is provided with an observation window of a relatively large size that allows an electron beam signal to pass therethrough, thereby achieving the aim of whole-process detection of changes in properties of the material of a relatively large size.
Inventors:
HE WEI (CN)
ZHAO XIN (CN)
ZHANG ZIHAO (CN)
SONG HANG (CN)
SHANG JUANJUAN (CN)
LI HONGFEI (CN)
NIU HUI (CN)
HU JICHUANG (CN)
ZHAO XIN (CN)
ZHANG ZIHAO (CN)
SONG HANG (CN)
SHANG JUANJUAN (CN)
LI HONGFEI (CN)
NIU HUI (CN)
HU JICHUANG (CN)
Application Number:
PCT/CN2023/096376
Publication Date:
March 28, 2024
Filing Date:
May 25, 2023
Export Citation:
Assignee:
NCS MICRO BEAMS BEIJING CO LTD (CN)
International Classes:
G01N23/22; G01N23/2251
Domestic Patent References:
| WO2021180365A1 | 2021-09-16 |
Foreign References:
| CN115774033A | 2023-03-10 | |||
| CN218331313U | 2023-01-17 | |||
| CN101813590A | 2010-08-25 | |||
| CN110068576A | 2019-07-30 | |||
| CN111257356A | 2020-06-09 | |||
| CN112378777A | 2021-02-19 | |||
| JP2004031207A | 2004-01-29 | |||
| US20020158200A1 | 2002-10-31 |
Attorney, Agent or Firm:
BEIJING JINZHIPUHUA INTELLECTUAL PROPERTY AGENCY CO.LTD (CN)
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