MULTI-INLET VACUUM PUMP

WIPO Patent Application WO/2010/097384

A3

The invention relates to a multi-inlet vacuum pump having a first pump device (10) provided with a first rotor element (18) comprising several first rotor disks (20) which are arranged successively in the conveying direction (36), and a second pump device (12) provided with a second rotor element (26) comprising several second rotor disks (28) which are arranged successively in the conveying direction (36). The diameter of the second rotor disks (28) is at least partially greater than the diameter of the first rotor disks (20). The claimed multi-inlet vacuum pump also comprises a main inlet (32) through which a first fluid flow (34) is suctioned by the first pump device (10) and is conveyed in the direction of the second pump device ( 12). Furthermore, said pump comprises an intermediate inlet (38) through which a second fluid flow (40) is suctioned by the second pump device (12) and is conveyed in the direction of a pump outlet. Both fluid flows (34, 40) are joined inside the second pump device (12), in particular between two adjacent rotor disks (28) of the second pump device (12).

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BEYER CHRISTIAN (DE)
HENRY MARKUS (DE)
ENGLAENDER HEINZ (DE)

PCT/EP2010/052282

November 18, 2010

February 23, 2010

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OERLIKON LEYBOLD VACUUM GMBH (DE)
BEYER CHRISTIAN (DE)
HENRY MARKUS (DE)
ENGLAENDER HEINZ (DE)

F04D19/04

US6030189A	2000-02-29
EP0464292A1	1992-01-08
US5733104A	1998-03-31

VON KIRSCHBAUM, Alexander (Bahnhofsvorplatz 1, Köln, DE)

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