MULTI-STAGE VACUUM PUMP - ANEST IWATA CORP

Title:

MULTI-STAGE VACUUM PUMP

Document Type and Number:

WIPO Patent Application WO/2011/077930

Kind Code:

A1

Abstract:

Disclosed is a multi-stage vacuum pump which can maintain high compression efficiency and which suppresses pulsations and power fluctuations. In the disclosed multi-stage vacuum pump, which compresses and emits gas drawn in by the rotation of pairs of engaged rotors which are attached to shafts in pump chambers which are connected in a plurality of stages, the phase angle (Δθ) of the rotors in adjacent pump chambers satisfy the following formula: Δθ≤C/S (wherein (C) represents the rotation angle of the rotors in one cycle from the drawing in of gas to the emission of gas from the pump chamber, and (S) represents the number of rotor stages). The angle of the rotors relative to the shaft are set so that the rotor angles (ψ) from a reference position to the point where the exhaust-side recess starts to open outwards satisfy the following conditions: ψ１≤ψｍ≤ψｎ, ψ１<ψn (wherein ψ1 represents the rotor angle of the first rotor from the upflow side of the gas flow, ψm represents an mth rotor angle, and ψn represents an nth rotor angle, n and m are natural numbers, and n>m).

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Inventors:

TANIGAWA SHIRO (JP)

Application Number:

PCT/JP2010/071706

Publication Date:

June 30, 2011

Filing Date:

December 03, 2010

Export Citation:

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Assignee:

ANEST IWATA CORP (JP)
TANIGAWA SHIRO (JP)

International Classes:

F04C25/02; F04C18/20; F04C23/00

Foreign References:

JPH06336990A	1994-12-06
JPS54182923U	1979-12-25
JPS6271392U	1987-05-07
JPS6375377A	1988-04-05
JPH0352392U	1991-05-21
JPS64383A	1989-01-05
JP2002130166A	2002-05-09
JP2008088879A	2008-04-17

Other References: