Title:
MULTI-WAFER SCRUBBING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/066405
Kind Code:
A1
Abstract:
Disclosed in the present invention is a multi-wafer scrubbing device, comprising a box body. Multiple compartments are provided in the box body; the bottoms of the multiple compartments are connected; a support wheel system and a scrubbing system are provided inside each compartment; the scrubbing system comprises a group of roller brush units; the roller brush units can get close to each other to scrub wafers or away from each other to take out the wafers; multiple scrubbing systems are connected by means of an opening and closing drive mechanism; the opening and closing drive mechanism is used for simultaneously driving multiple groups of roller brush units to get close to or away from each other. In the present invention, multiple groups of roller brush units are integrated into a same box body, thereby greatly shortening the distance between stations and effectively improving production efficiency per unit volume; the box body may have two compartments, three compartments or four compartments, etc., so that the degree of customization of the quantity of the compartments is high and the range of application is wide; one opening and closing drive mechanism is shared, thereby achieving synchronous opening and closing of different roller brush units, saving equipment space, and reducing purchasing costs.
Inventors:
YIN QI (CN)
XU XIAOYU (CN)
XU XIAOYU (CN)
Application Number:
PCT/CN2022/130778
Publication Date:
April 27, 2023
Filing Date:
November 09, 2022
Export Citation:
Assignee:
HANGZHOU SIZONE ELECTRONIC TECH INC (CN)
International Classes:
H01L21/67; B08B1/02; B08B3/02; B08B13/00
Foreign References:
| CN216288328U | 2022-04-12 | |||
| CN103386406A | 2013-11-13 | |||
| JPH10256207A | 1998-09-25 | |||
| KR100905920B1 | 2009-07-02 | |||
| US20050109371A1 | 2005-05-26 |
Attorney, Agent or Firm:
HANGZHOU KAIZHI PATENT AGENCY (GENERAL PARTNERSHIP) (CN)
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