Title:
MULTIAXIAL OSCILLATOR AND METHOD OF CONTROLLING THE SAME
Document Type and Number:
WIPO Patent Application WO/1999/014570
Kind Code:
A1
Abstract:
A multiaxial oscillator for oscillating a sample in translational and rotational directions, and a method of controlling the same. In a multiaxial oscillator, an oscillating point is set imaginatively, and a position corresponding to freedom including at least one of positional components of this oscillating point and at least one of load components of the oscillating point, and an instruction value of a load are determined. A position of and a load on an actual oscillating point corresponding to an instruction value are determined on the basis of a means for detecting the position of an oscillating point and a means for detecting a load on an oscillating point which are provided in the multiaxial oscillator. On the basis of the resultant position and value of the load and previously determined position and instruction value of the load, an oscillation instruction value with respect to an oscillator is computed. The oscillator is driven on the basis of this oscillation instruction value. This enables the control of the displacement of a sample in one direction, and a load in the other direction.
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Inventors:
Momoi, Yasuyuki (3-15-29, Inayoshi Chiyoda-mach, Niihari-gun Ibaraki 315, JP)
Horiuchi, Toshihiko (1-134-11, Kariyamachi Ushiku-shi, Ibaraki 300-12, JP)
Sugano, Masaharu (1881-52, Ami Ami-mach, Inashiki-gun Ibaraki 300-03, JP)
Horiuchi, Toshihiko (1-134-11, Kariyamachi Ushiku-shi, Ibaraki 300-12, JP)
Sugano, Masaharu (1881-52, Ami Ami-mach, Inashiki-gun Ibaraki 300-03, JP)
Application Number:
PCT/JP1997/003230
Publication Date:
March 25, 1999
Filing Date:
September 12, 1997
Export Citation:
Assignee:
HITACHI, LTD. (6 Kanda Surugadai 4-chome, Chiyoda-ku, Tokyo 101, JP)
Momoi, Yasuyuki (3-15-29, Inayoshi Chiyoda-mach, Niihari-gun Ibaraki 315, JP)
Horiuchi, Toshihiko (1-134-11, Kariyamachi Ushiku-shi, Ibaraki 300-12, JP)
Sugano, Masaharu (1881-52, Ami Ami-mach, Inashiki-gun Ibaraki 300-03, JP)
Momoi, Yasuyuki (3-15-29, Inayoshi Chiyoda-mach, Niihari-gun Ibaraki 315, JP)
Horiuchi, Toshihiko (1-134-11, Kariyamachi Ushiku-shi, Ibaraki 300-12, JP)
Sugano, Masaharu (1881-52, Ami Ami-mach, Inashiki-gun Ibaraki 300-03, JP)
International Classes:
G01M7/06; G01M7/00; (IPC1-7): G01M7/06
Attorney, Agent or Firm:
Ogawa, Katsuo (Hitachi Ltd, 5-1, Marunouchi 1-chom, Chiyoda-ku Tokyo 100, JP)
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