Title:
MULTIBAND TUNABLE MULTISCALE METAMATERIAL, PREPARATION METHOD, AND SPECTRUM DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/267228
Kind Code:
A1
Abstract:
Disclosed are a multiband tunable multiscale metamaterial, a preparation method, and a spectrum detection method. The metamaterial consists of a stretchable layer, a non-stretchable support layer, a metal layer, and a nanoparticle layer that are sequentially stacked from bottom to top; the stretchable layer is a polydimethylsiloxane layer, the non-stretchable support layer is a polyimide layer, the metal layer is a gold layer, and the nanoparticle layer is a nanoparticle layer modified with a hydrophobic group. Fluorosilane is first vacuum-evaporated on a silicon wafer, and polydimethylsiloxane is spin-coated and then heated and cured; after plasma cleaning, polyimide is spin-coated and then cured; gold is sputtered; nanoparticles modified with the hydrophobic group are self-assembled on a water surface and then transferred onto the metal layer; etching is performed according to a pattern and then separation and removal are performed. The metamaterial of the present invention can achieve a tunable function in multiple bands, and can take advantage of multiple bands for sensing biochemical molecules; the metamaterial also has the characteristic of multiple scales, the operation is simple, convenient and fast, and various detection requirements are satisfied.
Inventors:
XIE LIJUAN (CN)
WANG YINGLI (CN)
YING YIBIN (CN)
LIU XIANGJIANG (CN)
LI LIN (CN)
WANG YINGLI (CN)
YING YIBIN (CN)
LIU XIANGJIANG (CN)
LI LIN (CN)
Application Number:
PCT/CN2021/117103
Publication Date:
December 29, 2022
Filing Date:
September 08, 2021
Export Citation:
Assignee:
UNIV ZHEJIANG (CN)
International Classes:
C23C14/04; B32B3/10; B32B15/04; B32B15/16; C23C14/12; C23C14/20; C23C14/24; C23C14/34; C23C14/58; G01N21/3586; G01N21/65
Foreign References:
| CN112763475A | 2021-05-07 | |||
| CN207587978U | 2018-07-06 | |||
| CN109060762A | 2018-12-21 | |||
| CN110132881A | 2019-08-16 | |||
| US20120154793A1 | 2012-06-21 |
Attorney, Agent or Firm:
HANGZHOU QIUSHI PATENT OFFICE CO., LTD. (CN)
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