Title:
MULTIFUNCTIONAL VACUUMIZING DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/060337
Kind Code:
A1
Abstract:
A multifunctional vacuumizing device has a working valve connected to a vacuum valve by a communicating pipe. Vacuum pumps (2,3) are communicated with a working chamber (1) comprising at least one vacuum channel that is communicated with the vacuum valve by a communicating pipe. A gas manometer (64) is communicated with the vacuum valve by a communicating pipe. The vacuum pumps and the working chamber are located in a supporting structure (4). The vacuum pump, the vacuum valve and the working valve are controlled by a programmable logic controller via an electromagnetic valve.
Inventors:
WEN JINXUAN (CN)
Application Number:
PCT/CN2009/074746
Publication Date:
June 03, 2010
Filing Date:
November 02, 2009
Export Citation:
Assignee:
WEN JINXUAN (CN)
International Classes:
F04B37/14; F04B41/06; F04B49/00; F04B49/02; H01L21/00
Foreign References:
| US5469885A | 1995-11-28 | |||
| CN200940713Y | 2007-08-29 | |||
| CN101397986A | 2009-04-01 | |||
| CN1420526A | 2003-05-28 | |||
| EP1577559A1 | 2005-09-21 | |||
| US4725204A | 1988-02-16 |
Attorney, Agent or Firm:
KEYCOM INTELLECTUAL PROPERTY LIMITED (No.2 Huayuan Road Haidian District, Beijing 1, CN)
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