Title:
MULTILAYER FILM, DISPLAY DEVICE AND INPUT DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/212970
Kind Code:
A1
Abstract:
The present invention relates to a multilayer film which is obtained by sequentially laminating a first layer, a second layer and a third layer in this order, and wherein: the first layer is a metal thin film having an electrical resistance of 15 μΩ·cm or less; the second layer is an aluminum nitride film or aluminum alloy nitride film containing from 40% by atom to 61% by atom (inclusive) of nitrogen; and the third layer is an aluminum oxide film or aluminum alloy oxide film containing from 50% by atom to 60% by atom (inclusive) of oxygen, an aluminum oxynitride film or aluminum alloy oxynitride film containing from 50% by atom to 60% by atom (inclusive) of oxygen and from 1% by atom to 10% by atom (inclusive) of nitrogen, or an aluminum nitride film or aluminum alloy nitride film containing from 50% by atom to 60% by atom (inclusive) of nitrogen. A multilayer film according to the present invention is able to provide a multilayer thin film (a low reflection conductive film) which has both low electrical resistance and low reflectance.
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Inventors:
SHIDA YOKO
GOTO HIROSHI
GOTO HIROSHI
Application Number:
PCT/JP2017/019882
Publication Date:
December 14, 2017
Filing Date:
May 29, 2017
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
International Classes:
G06F3/041; B32B9/00; B82Y30/00
Foreign References:
| JP2016058055A | 2016-04-21 | |||
| JP2016500853A | 2016-01-14 | |||
| JP2014513335A | 2014-05-29 |
Attorney, Agent or Firm:
EIKOH PATENT FIRM, P.C. (JP)
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