Title:
MULTILAYER STRUCTURE AND METHOD FOR CLEANING SAME
Document Type and Number:
WIPO Patent Application WO/2007/007782
Kind Code:
A1
Abstract:
It has been difficult to provide a large-sized ceramic member quickly and economically. A
multilayer structure is produced by forming a ceramic film on a base which is made
of a material that can be shaped comparatively easily. The ceramic film is formed
by a plasma spraying method, CVD method, PVD method, sol-gel method or the like.
Alternatively, the ceramic film may be formed by a method combined with a spray
deposit film.
Inventors:
OHMI TADAHIRO (JP)
TERAMOTO AKINOBU (JP)
MORINAGA HITOSHI (JP)
KISHI YUKIO (JP)
OHTAKI HIROMICHI (JP)
TSUTAI YOSHIHUMI (JP)
TERAMOTO AKINOBU (JP)
MORINAGA HITOSHI (JP)
KISHI YUKIO (JP)
OHTAKI HIROMICHI (JP)
TSUTAI YOSHIHUMI (JP)
Application Number:
PCT/JP2006/313831
Publication Date:
January 18, 2007
Filing Date:
July 12, 2006
Export Citation:
Assignee:
UNIV TOHOKU (JP)
NIHON CERATEC CO LTD (JP)
OHMI TADAHIRO (JP)
TERAMOTO AKINOBU (JP)
MORINAGA HITOSHI (JP)
KISHI YUKIO (JP)
OHTAKI HIROMICHI (JP)
TSUTAI YOSHIHUMI (JP)
NIHON CERATEC CO LTD (JP)
OHMI TADAHIRO (JP)
TERAMOTO AKINOBU (JP)
MORINAGA HITOSHI (JP)
KISHI YUKIO (JP)
OHTAKI HIROMICHI (JP)
TSUTAI YOSHIHUMI (JP)
International Classes:
C23C26/00; B08B3/12; C23C14/08; C23C16/40; C23C28/04; H01L21/3065
Domestic Patent References:
| WO2004003962A2 | 2004-01-08 |
Foreign References:
| JP2004523649A | 2004-08-05 | |||
| JPH11265871A | 1999-09-28 | |||
| JPH1064868A | 1998-03-06 | |||
| JP2002261062A | 2002-09-13 |
Attorney, Agent or Firm:
IKEDA, Noriyasu et al. (4-10 Nishishinbashi 1-chom, Minato-ku Tokyo 03, JP)
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