Title:
MULTIPLE BEAM INSPECTION APPARATUS AND METHOD
Document Type and Number:
WIPO Patent Application WO2002014846
Kind Code:
A9
Abstract:
Disclosed is an optical inspection system for inspecting the surface of (11) a substrate (12). The optical inspection system includes a light source (52) for emitting an incident light beam (66) along an optical axis and a first set of optical elements arranged for separating the incident light beam into a plurality of light beams, directing the plurality of light beams to intersect with the surface of the substrate, and focusing the plurality of light beams to a plurality of scanning spots on the surface of the substrate. The inspection system further includes a light detector arrangement including in dividual light detectors (61A, 61B, 61C, 65A, 65B, 65C) that correspond to individual ones of a plurality of reflected or transmitted light beams caused by the intersection of the plurality of light beams with the surface of the substrate. The light detectors are arranged for sensing the light intensity of either the reflected or transmitted light.
Inventors:
KVAMME DAMON F
WALSH ROBERT W
WALSH ROBERT W
Application Number:
PCT/US2001/024931
Publication Date:
April 03, 2003
Filing Date:
August 08, 2001
Export Citation:
Assignee:
KLA TENCOR CORP (US)
International Classes:
G01N21/88; G01N21/956; G03F1/08; H01L21/027; H01L21/66; G01N21/95; (IPC1-7): G01N21/956; G01B11/30
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