Title:
MULTIPLE-MODE PLASMA GENERATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/109037
Kind Code:
A1
Abstract:
The present invention provides a multiple-mode plasma generation apparatus that can supply plasma in a plurality of processes to improve process efficiency. The plasma generation apparatus includes a first plasma generation part and a second plasma generation part connected in series with the first plasma generation part. Here, a gas is changed into plasma by magnetic fields generated by the first plasma generation part and the second plasma generation part. Also, the first plasma generation part is operated by low frequency power, and the second plasma generation part is operated by high frequency power.
Inventors:
WOO JE-HO (KR)
Application Number:
PCT/KR2013/000315
Publication Date:
July 25, 2013
Filing Date:
January 16, 2013
Export Citation:
Assignee:
EQBESTECH INC (KR)
International Classes:
H05H1/46; H01L21/3065; H03H7/40
Foreign References:
| JPH1116696A | 1999-01-22 | |||
| US7732759B2 | 2010-06-08 | |||
| KR100890630B1 | 2009-03-27 | |||
| KR20020079300A | 2002-10-19 | |||
| KR20090005763A | 2009-01-14 |
Attorney, Agent or Firm:
SONG, IN-HO (KR)
송인호 (KR)
송인호 (KR)
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Claims: