Title:
NANO PROTRUSION SURFACE FORMING METHOD AND BASE MATERIAL HAVING NANO PROTRUSION SURFACE FORMED BY METHOD
Document Type and Number:
WIPO Patent Application WO/2018/030703
Kind Code:
A1
Abstract:
The present invention relates to a nano protrusion forming method and a base material having a nano protrusion surface formed by the method, which forms, through a wet etching process by an acid solution without using a nano mask, an anti-reflection layer including a nano protrusion having a width of several nm to several tens of nm and/or an anti-glare layer including a protrusion having a width of several tens of nm to several um.
Inventors:
LEE SANG RO (KR)
KIM YUN HWAN (KR)
SEO JAE HYUNG (KR)
KIM KI HUN (KR)
LEE JI YOUNG (KR)
KIM YUN HWAN (KR)
SEO JAE HYUNG (KR)
KIM KI HUN (KR)
LEE JI YOUNG (KR)
Application Number:
PCT/KR2017/008349
Publication Date:
February 15, 2018
Filing Date:
August 02, 2017
Export Citation:
Assignee:
SEP INC (KR)
International Classes:
H01L21/306; G03F1/80; G03F7/20; H01L21/02; H01L21/3213
Foreign References:
| KR20120014879A | 2012-02-20 | |||
| JP5393087B2 | 2014-01-22 | |||
| KR101360821B1 | 2014-02-12 | |||
| KR20110032432A | 2011-03-30 | |||
| KR100928330B1 | 2009-11-26 |
Attorney, Agent or Firm:
YOON, Byong Kuk et al. (KR)
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