NANO-SIZED ULTRATHIN FILM DIELECTRIC, PROCESS FOR PRODUCING THE SAME AND NANO-SIZED ULTRATHIN FILM DIELECTRIC DEVICE

Title:

NANO-SIZED ULTRATHIN FILM DIELECTRIC, PROCESS FOR PRODUCING THE SAME AND NANO-SIZED ULTRATHIN FILM DIELECTRIC DEVICE

Document Type and Number:

WIPO Patent Application WO/2007/094244

Kind Code:

A1

Abstract:

A nano-sized ultrathin film dielectric composed mainly of either a single nanosheet of titanium oxide obtained by peeling layer titanium oxide or a laminate thereof. Thus, there can be accomplished low-temperature production of a dielectric device that simultaneously realizes excellent insulation performance and high dielectric constant in nanoregions and reduces influences of substrate interface deterioration and composition departure.

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Inventors:

OSADA, Minoru (2-1, Sengen 1-chome, Tsukuba-sh, Ibaraki 47, 3050047, JP)
長田実 (〒47 茨城県つくば市千現１丁目２番１号独立行政法人物質・材料研究機構内 Ibaraki, 3050047, JP)

Application Number:

JP2007/052287

Publication Date:

August 23, 2007

Filing Date:

February 08, 2007

Export Citation:

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Assignee:

NATIONAL INSTITUTE FOR MATERIALS SCIENCE (2-1 Sengen 1-chome, Tsukuba-shi Ibaraki, 47, 3050047, JP)
独立行政法人物質・材料研究機構 (〒47 茨城県つくば市千現１丁目２番１号 Ibaraki, 3050047, JP)
OSADA, Minoru (2-1, Sengen 1-chome, Tsukuba-sh, Ibaraki 47, 3050047, JP)

International Classes:

H01L29/78; C01G23/04; C09D1/00; H01B3/00; H01B17/60; H01B19/00; H01L21/316; H01L21/8242; H01L27/108

Attorney, Agent or Firm:

NISHIZAWA, Toshio (Three F Minami Aoyama Bldg. 7F, 11-1 Minami-Aoyama 6-chom, Minato-ku Tokyo, 107-0062, JP)

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