Title:
NANO-STRUCTURED SURFACE
Document Type and Number:
WIPO Patent Application WO/2012/054281
Kind Code:
A3
Abstract:
A method of forming a nano-structured substrate is provided, the method comprising including forming non-integral nano-pillars on a substrate surface and directionally etching the substrate surface using the non-integral nano-pillars as a mask to form integral nano-structures in the substrate.
Inventors:
MARDILOVICH PETER (US)
FULLER ANTHONY M (US)
WEI QINGQIAO (US)
FULLER ANTHONY M (US)
WEI QINGQIAO (US)
Application Number:
PCT/US2011/056049
Publication Date:
August 16, 2012
Filing Date:
October 13, 2011
Export Citation:
Assignee:
HEWLETT PACKARD DEVELOPMENT CO (US)
MARDILOVICH PETER (US)
FULLER ANTHONY M (US)
WEI QINGQIAO (US)
MARDILOVICH PETER (US)
FULLER ANTHONY M (US)
WEI QINGQIAO (US)
International Classes:
B82B1/00; B82B3/00; B82Y30/00
Foreign References:
| US20030010971A1 | 2003-01-16 | |||
| US7384792B1 | 2008-06-10 |
Other References:
CROUSE, D. ET AL.: "Self-ordered pore structure of anodized aluminum on silic on and pattern transfer", APPL. PHYS. LETT., vol. 76, no. 1, 3 January 2000 (2000-01-03), pages 49 - 51
SHINGUBARA, S. ET AL.: "Nucleation and growth of the nanostructured anodic oxi des on tantalum and niobium under the porous alumina film", ELECTROCHIMICA ACTA, vol. 48, 30 September 2003 (2003-09-30), pages 3155 - 3170
SAI, H. ET AL.: "Antireflective subwavelength structures on crystalline Si fa bricated using directly formed anodic porous alumina masks", APPL. PHYS. LETT, vol. 88, no. 20, 18 May 2006 (2006-05-18), pages 201116-1 - 201116-3, XP012081691, DOI: doi:10.1063/1.2205173
SHINGUBARA, S. ET AL.: "Nucleation and growth of the nanostructured anodic oxi des on tantalum and niobium under the porous alumina film", ELECTROCHIMICA ACTA, vol. 48, 30 September 2003 (2003-09-30), pages 3155 - 3170
SAI, H. ET AL.: "Antireflective subwavelength structures on crystalline Si fa bricated using directly formed anodic porous alumina masks", APPL. PHYS. LETT, vol. 88, no. 20, 18 May 2006 (2006-05-18), pages 201116-1 - 201116-3, XP012081691, DOI: doi:10.1063/1.2205173
Attorney, Agent or Firm:
KARNSTEIN, Walter W. et al. (3404 E. Harmony RoadMail Stop 3, Fort Collins Colorado, US)
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