Title:
NANOMACHINED AND MICROMACHINED ELECTRODES FOR ELECTROCHEMICAL DEVICES
Document Type and Number:
WIPO Patent Application WO2005017971
Kind Code:
A9
Abstract:
A nanomachined and micromachined electrode (10) is disclosed that is produced by providing a layer of aluminum (11) positioned upon a conductive substrate (12), anodizing the layer of aluminum to produce a layer of aluminum oxide (13) having an array of pores (14), depositing a sacrificial metal (17) within the pores of the aluminum oxide layer, etching the aluminum oxide layer so as to leave an array of sacrificial metal rods (18), depositing a layer of electrode material (19) between the array of sacrificial metal rods, and etching the sacrificial metal rods so that a layer of copper remains having an array of pores (20) where the sacrificial metal rods had existed. The layer of copper is the electrode (10).
Inventors:
BABIC DAVORIN
BAXLEY JOHN M
BROWNE PAUL D
BAXLEY JOHN M
BROWNE PAUL D
Application Number:
PCT/US2004/026534
Publication Date:
September 09, 2005
Filing Date:
August 16, 2004
Export Citation:
Assignee:
JOHNSON RES & DEV COMPANY INC (US)
International Classes:
C25B11/00; C25B11/04; C25D1/00; C25D1/08; C25D3/38; C25D3/66; C25D5/10; C25D5/34; C25D5/48; C25D11/04; C25D11/06; C25D17/10; C25D17/12; H01L; (IPC1-7): C25D5/34; C25D5/48; C25D3/66; C25D3/38; C25D11/04; C25D11/06; C25D17/10; C25D17/12; C25B11/00; C25B11/04
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