Title:
NANOPARTICLE EVALUATION METHOD AND NANOPARTICLE OBSERVATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/070324
Kind Code:
A1
Abstract:
In the present invention, a part of a sample where nanoparticles are to be quantitatively observed with precision by an electron microscope (TEM, SEM), an atomic force microscope (AFM), etc., is selected by a simple method using an optical microscope, etc. A nanoparticle observation device 10 is provided with a stage 12, a white LED 14, a color digital camera 28, a computer 30, and an AFM 40. The white LED 14 is provided so as to irradiate nanoparticles in a sample S on the stage 12 with white light from an oblique direction. The color digital camera 28 stores, as digital data, the wavelength and intensity of scattered light which results from the light from the white LED 14 being scattered by the nanoparticles. The computer 30 calculates, on the basis of the digital data stored in the color digital camera 28, a blue light intensity which is the intensity of blue light and a total scattered light intensity which is the sum of the light intensities of three primary color lights. A part of the sample S where the total scattered light intensity, and the blue light intensity/the total scattered light intensity are high is observed with precision by the AFM 40.
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Inventors:
TOKIZAKI TAKASHI (JP)
Application Number:
PCT/JP2017/036174
Publication Date:
April 19, 2018
Filing Date:
October 04, 2017
Export Citation:
Assignee:
AIST (JP)
International Classes:
G01N15/00; G01N21/27; G01N21/47; G01Q30/02; H01J37/20
Domestic Patent References:
| WO2015187881A1 | 2015-12-10 |
Foreign References:
| JP2003161688A | 2003-06-06 | |||
| JP2004500669A | 2004-01-08 | |||
| JP2014524581A | 2014-09-22 | |||
| JP2004275187A | 2004-10-07 | |||
| JP2013072679A | 2013-04-22 |
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