Title:
NANOPORE DEVICE AND METHOD OF MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2019/068034
Kind Code:
A3
Abstract:
A 3D nanopore device for characterizing biopolymer molecules includes a first selecting layer having a first axis of selection. The device also includes a second selecting layer disposed adjacent the first selecting layer and having a second axis of selection orthogonal to the first axis of selection. The device further includes an third electrode layer disposed adjacent the second selecting layer, such that the first selecting layer, the second selecting layer, and the third electrode layer form a stack of layers along a Z axis and define a plurality of nanopore pillars.
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Inventors:
HAN KYUNG JOON (US)
YOON JUNGKEE (US)
YOON JUNGKEE (US)
Application Number:
PCT/US2018/053624
Publication Date:
June 27, 2019
Filing Date:
September 28, 2018
Export Citation:
Assignee:
BIOTHLON INC (US)
International Classes:
B01D67/00; G01N33/487; C12Q1/6869
Domestic Patent References:
| WO2013016486A1 | 2013-01-31 | |||
| WO2013155116A1 | 2013-10-17 | |||
| WO2015111760A1 | 2015-07-30 |
Other References:
ITARU YANAGI ET AL: "Multichannel detection of ionic currents through two nanopores fabricated on integrated Si 3 N 4 membranes", LAB ON A CHIP, vol. 16, no. 17, 1 January 2016 (2016-01-01), pages 3340 - 3350, XP055555421, ISSN: 1473-0197, DOI: 10.1039/C6LC00639F
JU-HYUN LEE ET AL: "Fabrication and verification of DNA functionalized nanopore with gold layer embedded structure for bio-molecular sensing", NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE (NMDC), 2011 IEEE, IEEE, 18 October 2011 (2011-10-18), pages 168 - 171, XP032192010, ISBN: 978-1-4577-2139-7, DOI: 10.1109/NMDC.2011.6155333
JINGWEI BAI ET AL: "Fabrication of sub-20 nm nanopore arrays in membranes with embedded metal electrodes at wafer scales", NANOSCALE, vol. 6, no. 15, 1 January 2014 (2014-01-01), United Kingdom, pages 8900 - 8906, XP055571043, ISSN: 2040-3364, DOI: 10.1039/C3NR06723H
YING CUIFENG ET AL: "3D nanopore shape control by current-stimulus dielectric breakdown", APPLIED PHYSICS LETTERS, A I P PUBLISHING LLC, US, vol. 109, no. 6, 8 August 2016 (2016-08-08), XP012210346, ISSN: 0003-6951, [retrieved on 20160808], DOI: 10.1063/1.4960636
ITARU YANAGI ET AL: "Fabrication of 3-nm-thick Si3N4 membranes for solid-state nanopores using the poly-Si sacrificial layer process", SCIENTIFIC REPORTS, vol. 5, no. 1, 1 October 2015 (2015-10-01), XP055435551, DOI: 10.1038/srep14656
JU-HYUN LEE ET AL: "Fabrication and verification of DNA functionalized nanopore with gold layer embedded structure for bio-molecular sensing", NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE (NMDC), 2011 IEEE, IEEE, 18 October 2011 (2011-10-18), pages 168 - 171, XP032192010, ISBN: 978-1-4577-2139-7, DOI: 10.1109/NMDC.2011.6155333
JINGWEI BAI ET AL: "Fabrication of sub-20 nm nanopore arrays in membranes with embedded metal electrodes at wafer scales", NANOSCALE, vol. 6, no. 15, 1 January 2014 (2014-01-01), United Kingdom, pages 8900 - 8906, XP055571043, ISSN: 2040-3364, DOI: 10.1039/C3NR06723H
YING CUIFENG ET AL: "3D nanopore shape control by current-stimulus dielectric breakdown", APPLIED PHYSICS LETTERS, A I P PUBLISHING LLC, US, vol. 109, no. 6, 8 August 2016 (2016-08-08), XP012210346, ISSN: 0003-6951, [retrieved on 20160808], DOI: 10.1063/1.4960636
ITARU YANAGI ET AL: "Fabrication of 3-nm-thick Si3N4 membranes for solid-state nanopores using the poly-Si sacrificial layer process", SCIENTIFIC REPORTS, vol. 5, no. 1, 1 October 2015 (2015-10-01), XP055435551, DOI: 10.1038/srep14656
Attorney, Agent or Firm:
MEI, Peter C. et al. (US)
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