Title:
NANOPOSITIONER
Document Type and Number:
WIPO Patent Application WO/2004/007144
Kind Code:
A1
Abstract:
The invention relates to accurate positioning devices which make it possible to displace an object within a nanometric range. The inventive device comprises a fixed base element (BE) provided with accurate and rough positioning steps which are arranged thereon in such a way that they are reciprocatingly movable. The rough positioning step is cinematically connected to the BE and to the accurate positioning step in such a way that they are synchronously movable with respect to the BE. The kinetic connection of said steps is embodied in such a way that the accurate positioning step is autonomously movable with respect to the rough positioning step. Said steps are disposed in such a way that they are autonomously movable with respect to the BE and with respect to each other along two reference axes. The rough positioning step is embodied in a form of a rigid supporting plate, the accurate positioning step being embodied in the form of a rectangular frame which is rigidly fixed to said plate. A mobile mounting element is arranged inside said frame in such a way that it is movable and/or fixable in a specified position by means of nanometric positioning elements which are arranged on each side of the frame.
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Inventors:
Rakhovski, Vadim Israilovich (1-y Botkinsky pr-d, 6-25 Moscow, 4, 12528, RU)
Application Number:
PCT/RU2003/000291
Publication Date:
January 22, 2004
Filing Date:
July 03, 2003
Export Citation:
Assignee:
Rakhovski, Vadim Israilovich (1-y Botkinsky pr-d, 6-25 Moscow, 4, 12528, RU)
International Classes:
B23Q15/22; B23Q1/34; B23Q1/62; B23Q17/22; B23Q15/20; B23Q1/25; B23Q1/26; B23Q17/22; (IPC1-7): B23Q15/22; B23Q17/22
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