NANOROD PRODUCTION METHOD AND NANOROD PRODUCED THEREBY

Title:

NANOROD PRODUCTION METHOD AND NANOROD PRODUCED THEREBY

Document Type and Number:

WIPO Patent Application WO/2017/150848

Kind Code:

A1

Abstract:

A nanorod production method is provided. The nanorod production method comprises the steps of: providing a growth substrate and a support substrate; epitaxially growing a nanomaterial layer onto one surface of the growth substrate; forming a sacrificial layer on one surface of the support substrate; bonding the nanomaterial layer with the sacrificial layer; separating the growth substrate from the nanomaterial layer; flattening the nanomaterial layer; forming a nanorod by etching the nanomaterial layer; and separating the nanorod by removing the sacrificial layer.

Inventors:

DO YOUNG RAG (KR)
SUNG YEON GOOG (KR)

Application Number:

PCT/KR2017/002053

Publication Date:

September 08, 2017

Filing Date:

February 24, 2017

Export Citation:

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Assignee:

PSI CO LTD (KR)

International Classes:

H01L29/06; H01L21/02; H01L21/205; H01L21/304; H01L21/306; H01L21/3063; H01L29/41

Foreign References:

KR20100025838A	2010-03-10
KR20100024874A	2010-03-08
US20060116002A1	2006-06-01
KR101403091B1	2014-07-01
KR20150116345A	2015-10-15

Other References: