Title:
NANOSTRUCTURED SEMICONDUCTOR MATERIALS, METHOD FOR THE MANUFACTURE THEREOF AND CURRENT PULSE GENERATOR FOR CARRYING OUT SAID METHOD
Document Type and Number:
WIPO Patent Application WO/2012/065825
Kind Code:
A3
Abstract:
The present invention relates to a method for electrochemical treatments of a semiconductor material and the electrical pulse generator for said method used in the production of three-dimensional structures integrated in a wafer of semiconductor material or free standing nanostructured particles, characterized in that it comprises at least one step for the anodic formation of one or multiple porous layers etched in a semiconductor by means of applying electric current pulses with modulation of its intensity in time, a step of lifting the layers from the substrate by ultrasounds or mechanically and, optionally, a step of mechanical grinding.
Inventors:
MATVEYEVA YAUHENYIA (ES)
MAKUSHOK YURI (ES)
PASTOR GALIANO ESTER LORENA (ES)
MAKUSHOK YURI (ES)
PASTOR GALIANO ESTER LORENA (ES)
Application Number:
PCT/EP2011/068940
Publication Date:
August 02, 2012
Filing Date:
October 28, 2011
Export Citation:
Assignee:
EM SILICON NANO TECHNOLOGIES S L (ES)
MATVEYEVA YAUHENYIA (ES)
MAKUSHOK YURI (ES)
PASTOR GALIANO ESTER LORENA (ES)
MATVEYEVA YAUHENYIA (ES)
MAKUSHOK YURI (ES)
PASTOR GALIANO ESTER LORENA (ES)
International Classes:
C25D11/32; H03K3/53
Foreign References:
| DE4139112A1 | 1992-06-11 | |||
| US20020179433A1 | 2002-12-05 |
Other References:
GELLOZ B ET AL: "Stabilization and operation of porous silicon photonic structures from near-ultraviolet to near-infrared using high-pressure water vapor annealing", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 518, no. 12, 2 April 2010 (2010-04-02), pages 3276 - 3279, XP026946857, ISSN: 0040-6090, [retrieved on 20090904], DOI: 10.1016/J.TSF.2009.08.043
LAMMEL G ET AL: "Microspectrometer based on a tunable optical filter of porous silicon", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 92, no. 1-3, 1 August 2001 (2001-08-01), pages 52 - 59, XP004274024, ISSN: 0924-4247, DOI: 10.1016/S0924-4247(01)00539-8
S. LEE ET AL.: "Optical Properties of Multilayered Porous-Si Formed by Current Pulse Modulation During Electrochemical Anodization", JOURNAL OF KOREAN PHYSICAL SOCIETY, vol. 47, no. 5, November 2005 (2005-11-01), pages 876 - 879, XP002668941
LILLIS B ET AL: "Microporous silicon and biosensor development: structural analysis, electrical characterisation and biocapacity evaluation", BIOSENSORS AND BIOELECTRONICS, ELSEVIER BV, NL, vol. 21, no. 2, 15 August 2005 (2005-08-15), pages 282 - 292, XP004981152, ISSN: 0956-5663, DOI: 10.1016/J.BIOS.2004.09.031
LIU H ET AL: "Observation of picosecond nonlinear optical response from porous silicon", JOURNAL OF LUMINESCENCE, ELSEVIER BV NORTH-HOLLAND, NL, vol. 83-84, 1 November 1999 (1999-11-01), pages 37 - 41, XP027337559, ISSN: 0022-2313, [retrieved on 19991101]
LAMMEL G ET AL: "Microspectrometer based on a tunable optical filter of porous silicon", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 92, no. 1-3, 1 August 2001 (2001-08-01), pages 52 - 59, XP004274024, ISSN: 0924-4247, DOI: 10.1016/S0924-4247(01)00539-8
S. LEE ET AL.: "Optical Properties of Multilayered Porous-Si Formed by Current Pulse Modulation During Electrochemical Anodization", JOURNAL OF KOREAN PHYSICAL SOCIETY, vol. 47, no. 5, November 2005 (2005-11-01), pages 876 - 879, XP002668941
LILLIS B ET AL: "Microporous silicon and biosensor development: structural analysis, electrical characterisation and biocapacity evaluation", BIOSENSORS AND BIOELECTRONICS, ELSEVIER BV, NL, vol. 21, no. 2, 15 August 2005 (2005-08-15), pages 282 - 292, XP004981152, ISSN: 0956-5663, DOI: 10.1016/J.BIOS.2004.09.031
LIU H ET AL: "Observation of picosecond nonlinear optical response from porous silicon", JOURNAL OF LUMINESCENCE, ELSEVIER BV NORTH-HOLLAND, NL, vol. 83-84, 1 November 1999 (1999-11-01), pages 37 - 41, XP027337559, ISSN: 0022-2313, [retrieved on 19991101]
Attorney, Agent or Firm:
CARPINTERO LOPEZ, Francisco (C/ Alcala 35, Madrid, ES)
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