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Title:
NANOWIRE GIANT PIEZO-RESISTIVE PROPERTY MEASUREMENT DEVICE AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2017/080340
Kind Code:
A1
Abstract:
Provided are a nanowire giant piezo-resistive property measurement device and a manufacturing method therefor. The measurement device comprises: a nanowire (6); a platinum resistance temperature sensor (1); an electrothermal actuator (2); a capacitive measurement-based displacement sensor (3); an electrode (4); and a capacitive measurement-based load sensor (9). The platinum resistance temperature sensor (1), the electrothermal actuator (2), the displacement sensor (3), and the load sensor (9) are connected sequentially. There are four electrodes (4). The four electrodes (4) are disposed between the displacement sensor (3) and the load sensor (9). The nanowire (6) is disposed between two horizontally placed electrodes (4). The electrodes (4) are disposed at an upper side and a lower side of the nanowire (6). The measurement device and the manufacturing method therefor can realize concurrent measurement of a mechanical property and an electrical property of the nanowire (6), thereby completing characterization of a piezo-resistive coefficient. The invention is applicable to a variety of measurement samples.

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Inventors:
ZHANG JIAHONG (CN)
ZHAO YANG (CN)
LI MIN (CN)
YANG MIN (CN)
Application Number:
PCT/CN2016/102073
Publication Date:
May 18, 2017
Filing Date:
October 14, 2016
Export Citation:
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Assignee:
UNIV NANJING INFORMATION SCIENCE & TECH (CN)
International Classes:
G01R27/02; B82Y15/00; G01R3/00
Domestic Patent References:
WO2009038579A22009-03-26
Foreign References:
CN105223421A2016-01-06
CN205193157U2016-04-27
CN104090165A2014-10-08
CN102502479A2012-06-20
CN101251426A2008-08-27
CN102253285A2011-11-23
CN101565162A2009-10-28
Attorney, Agent or Firm:
NANJING ZONGHENG INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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