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Title:
NARROW-BAND FILTER BASED ON DIELECTRIC METASURFACE STRUCTURE AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/019575
Kind Code:
A1
Abstract:
A narrow-band filter based on a dielectric metasurface structure and a manufacturing method therefor. The narrow-band filter comprises a substrate (3), a multilayer dielectric film (2), and a dielectric metasurface (1) prepared on the film. The dielectric metasurface (1) is of a sub-wavelength periodic structure; a vertically incident beam can excite clustered coherent oscillation of an internal light field of the dielectric metasurface (1), and said oscillation interacts with incident light to change the transmission and reflection characteristics of the light. By designing structural units and arrangement of the dielectric metasurface, the bandwidth of resonance can be reduced, thereby achieving the characteristics of narrow-band filtering. The manufacturing method comprises: forming an anti-corrosion mask of a metasurface pattern structure after growing a multilayer dielectric film material on a substrate; transferring the pattern structure onto a top-layer dielectric film; and removing the mask and cleaning. The manufacturing steps of the narrow-band filter are simple and compatible with CMOS processes, and can simultaneously achieve narrow bandwidth and high extinction ratio. Compared with conventional narrow-band filters having multilayer films, process costs are reduced, and narrower bandwidth and higher reflectivity are achieved.

Inventors:
XIA JINSONG (CN)
YUAN SHUAI (CN)
ZENG CHENG (CN)
Application Number:
CN2018/114704
Publication Date:
January 30, 2020
Filing Date:
November 09, 2018
Export Citation:
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Assignee:
UNIV HUAZHONG SCIENCE TECH (CN)
International Classes:
G02B5/20; G02B5/23; G02B5/26
Foreign References:
CN106483594A2017-03-08
CN107315206A2017-11-03
CN103928297A2014-07-16
CN107121715A2017-09-01
US20170082842A12017-03-23
Attorney, Agent or Firm:
HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY PATENT AGENCY CENTER (Suite 340, Building East One Huazhong University of Science and Technology, No.1037, Luoyu Road, Hongsha, Wuhan Hubei 4, 430074, CN)
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