Title:
NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2012/133429
Kind Code:
A1
Abstract:
[Problem] To provide a negative photosensitive resin composition, which can be formed into a thick film even a solution thereof has a low viscosity, which is free from tack even before exposure, which can be patterned with high resolution by alkaline development, and a coating film formed from which has high transparency and is reduced in shrinkage after post baking.
[Solution] A photosensitive resin composition which contains the following component (A), component (B), component (C) and component (D).
Component (A): an acrylic copolymer which is obtained by copolymerizing a monomer mixture that contains at least (i) maleimide and (ii) a monomer having an epoxy group
Component (B): a photoacid generator
Component (C): a compound having two or more epoxy groups
Component (D): a solvent
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Inventors:
HATANAKA TADASHI (JP)
HATTORI HAYATO (JP)
UCHIYAMA MEGUMI (JP)
HATTORI HAYATO (JP)
UCHIYAMA MEGUMI (JP)
Application Number:
PCT/JP2012/057965
Publication Date:
October 04, 2012
Filing Date:
March 27, 2012
Export Citation:
Assignee:
NISSAN CHEMICAL IND LTD (JP)
HATANAKA TADASHI (JP)
HATTORI HAYATO (JP)
UCHIYAMA MEGUMI (JP)
HATANAKA TADASHI (JP)
HATTORI HAYATO (JP)
UCHIYAMA MEGUMI (JP)
International Classes:
G03F7/038; C08F220/32; C08F222/40; G03F7/004
Foreign References:
JPH06250390A | 1994-09-09 | |||
JP2004051876A | 2004-02-19 | |||
JP2008026660A | 2008-02-07 | |||
JPH03192260A | 1991-08-22 | |||
JP2007171973A | 2007-07-05 |
Attorney, Agent or Firm:
HANABUSA, Tsuneo et al. (JP)
Sepal Tsuneo (JP)
Sepal Tsuneo (JP)
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Claims: