Title:
NEGATIVE RESIST COMPOSITION FOR PROTRUDING ELECTRODE AND METHOD FOR MANUFACTURING PROTRUDING ELECTRODE
Document Type and Number:
WIPO Patent Application WO/2018/123626
Kind Code:
A1
Abstract:
The present invention provides a negative resist composition for a protruding electrode with a resist film having a light transmittance of 30% or less at a wavelength of 365 nm on producing a resist film with a thickness of 3.5 µm.
Inventors:
SATO NOBUHIRO (JP)
ABE NOBUNORI (JP)
ABE NOBUNORI (JP)
Application Number:
PCT/JP2017/044987
Publication Date:
July 05, 2018
Filing Date:
December 14, 2017
Export Citation:
Assignee:
ZEON CORP (JP)
International Classes:
G03F7/004; G03F7/20; H01L21/60; H05K3/34
Foreign References:
| JP2010224308A | 2010-10-07 | |||
| JP2005316412A | 2005-11-10 | |||
| JPH04217324A | 1992-08-07 |
Attorney, Agent or Firm:
SUGIMURA Kenji (JP)
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