Title:
NEGATIVE-TONE RADIATION-SENSITIVE SHEET, AND PATTERNED SHEET
Document Type and Number:
WIPO Patent Application WO/2022/145428
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing: a negative-tone radiation-sensitive sheet on which a fine pattern can be formed, and which has excellent transparency; and a patterned sheet which is produced by removing at least a portion of a light-unexposed area in the negative-tone radiation-sensitive sheet throughout in the thickness direction. The negative-tone radiation-sensitive sheet according to the present invention comprises at least a radiation-sensitive composition and fine fibrous cellulose having a fiber width of 1,000 nm or less, in which the radiation-sensitive composition contains a polymerizable unsaturated bond and also contains a compound (X) having a Hansen solubility parameter (HSP) distance to water of 36 MPa0.5 or less and a polarity term (dP) of 10 MPa0.5 or more.
Inventors:
KAJITA KEIICHI (JP)
SUGITA HIKARU (JP)
SUGITA HIKARU (JP)
Application Number:
PCT/JP2021/048643
Publication Date:
July 07, 2022
Filing Date:
December 27, 2021
Export Citation:
Assignee:
OJI HOLDINGS CORP (JP)
JSR CORP (JP)
JSR CORP (JP)
International Classes:
D21H11/20; G03F7/004; G03F7/027; G03F7/032
Foreign References:
| JP2018163358A | 2018-10-18 | |||
| JP2014219522A | 2014-11-20 | |||
| JP2016096291A | 2016-05-26 |
Attorney, Agent or Firm:
OHTANI PATENT OFFICE (JP)
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