Title:
NEUTRON DIFFRACTION GRATING AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2021/005925
Kind Code:
A1
Abstract:
A neutron diffraction grating (1) according to the present invention is manufactured by preparing a neutron transmission substrate (101) made of a neutron transmissive material such as aluminum, silicon, or quartz, stacking an adhesion reinforcing layer (102) made of an adhesion reinforcing material such as titanium, aluminum, or silicon on the neutron transmission substrate, forming a multilayer film layer (106) by alternately stacking Gd thin-film layers (103) made of gadolinium and Ti thin-film layers (104) made of titanium on the adhesion reinforcing layer, forming a multilayer film substrate (10) by stacking an antioxidation layer (108) made of an antioxidation material such as titanium, aluminum, chrome, carbon, or silicon on the multilayer film layer, and forming a micro-pattern on the multilayer film substrate by cutting the antioxidation layer and the multilayer film layer.
Inventors:
HINO MASAHIRO (JP)
KAWABATA YUJI (JP)
HOSOBATA TAKUYA (JP)
YAMAGATA YUTAKA (JP)
KAWABATA YUJI (JP)
HOSOBATA TAKUYA (JP)
YAMAGATA YUTAKA (JP)
Application Number:
PCT/JP2020/021967
Publication Date:
January 14, 2021
Filing Date:
June 03, 2020
Export Citation:
Assignee:
UNIV KYOTO (JP)
RIKEN (JP)
RIKEN (JP)
International Classes:
G01N23/041; G01T7/00; G21K1/06
Foreign References:
| JPH04232900A | 1992-08-21 | |||
| JP2019078717A | 2019-05-23 |
Other References:
SAMOTO, TETSUO AND TAKANO HIDEKAZU, MOMOSE ATSUSHI: "Gadolinium oblique evaporation approach to make large scale neutron absorption gratings for phase imaging", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 58, 28 March 2019 (2019-03-28), pages 1 - 6, XP055782801, DOI: 10.7567/1347-4065/ab138d
SCHAERPF , O.: "Comparison of theoretical and experimental behaviour of supermirrors and discussion of limitations", PHYSICA B, vol. 156, 157, 1989, pages 631 - 638, XP024646964, DOI: 10.1016/0921-4526(89)90750-3
SPRINGELL, R, LANGRIDGE S., WILDES A., WILKINS S. B., SANCHEZ-HANKE C., MOORE K. T., BUTTERFIELD M. T., CHIVALL J., WARD R. C. C.,: "Chemicaland magnetic structure of uranium/gadolinium multilayers studied by transmission electron microscopy, neutron scattering, and x-ray reflectivity", PHYSICAL REVIEW B, vol. 81, no. 134434, 29 April 2010 (2010-04-29), pages 1 - 13, XP055782804, DOI: 10.1103/PhysRevB.81.134434
SCHAERPF , O.: "Comparison of theoretical and experimental behaviour of supermirrors and discussion of limitations", PHYSICA B, vol. 156, 157, 1989, pages 631 - 638, XP024646964, DOI: 10.1016/0921-4526(89)90750-3
SPRINGELL, R, LANGRIDGE S., WILDES A., WILKINS S. B., SANCHEZ-HANKE C., MOORE K. T., BUTTERFIELD M. T., CHIVALL J., WARD R. C. C.,: "Chemicaland magnetic structure of uranium/gadolinium multilayers studied by transmission electron microscopy, neutron scattering, and x-ray reflectivity", PHYSICAL REVIEW B, vol. 81, no. 134434, 29 April 2010 (2010-04-29), pages 1 - 13, XP055782804, DOI: 10.1103/PhysRevB.81.134434
Attorney, Agent or Firm:
KYOTO INTERNATIONAL PATENT LAW OFFICE (JP)
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