Title:
NITRIDE-BASED SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
WIPO Patent Application WO/2023/102744
Kind Code:
A1
Abstract:
A nitride-based semiconductor device includes a first nitride-based semiconductor layer, a second nitride-based semiconductor layer, a nitride-based layer, and a plurality of gate electrodes. The second nitride-based semiconductor layer is disposed on the first nitride-based semiconductor layer and has a bandgap greater than a bandgap of the first nitride-based semiconductor layer. The nitride-based layer is disposed over the second nitride-based semiconductor layer and extends along a first direction to have a strip profile. The gate electrodes are disposed over the nitride-based layer and arranged along the first direction such that at least two of the gate electrodes are separated from each other.
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Inventors:
RAO JIAN (CN)
YOU JHENG-SHENG (CN)
CHEN PO-WEI (CN)
CHANG MING-HONG (CN)
YOU JHENG-SHENG (CN)
CHEN PO-WEI (CN)
CHANG MING-HONG (CN)
Application Number:
PCT/CN2021/136166
Publication Date:
June 15, 2023
Filing Date:
December 07, 2021
Export Citation:
Assignee:
INNOSCIENCE SUZHOU SEMICONDUCTOR CO LTD (CN)
International Classes:
H01L29/66; H01L29/20
Foreign References:
CN112930602A | 2021-06-08 | |||
CN105047707A | 2015-11-11 | |||
US20150021616A1 | 2015-01-22 | |||
US20200357907A1 | 2020-11-12 |
Attorney, Agent or Firm:
IDEA INTELLECTUAL (SHENZHEN) IP AGENCY (CN)
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