NITRIDE CERAMIC SUBSTRATE PRODUCTION METHOD AND NITRIDE CERAMIC BASE MATERIAL

Title:

NITRIDE CERAMIC SUBSTRATE PRODUCTION METHOD AND NITRIDE CERAMIC BASE MATERIAL

Document Type and Number:

WIPO Patent Application WO/2020/189526

Kind Code:

A1

Abstract:

In this invention, first, a scribe line (110) is formed, by means of a laser, on a first surface (102) of a nitride ceramic base material (100). Then, the nitride ceramic base material (100) is split along the scribe line (110). The scribe line (110) includes a plurality of recessed portions (112). The plurality of recessed portions (112) are formed in one row on the first surface (102) of the nitride ceramic base material (100). The depth (d) of each of the plurality of recessed portions (112) is from 0.70 times to 1.10 times the opening width (w) of each of the plurality of recessed portions (112). The opening width (w) of each of the plurality of recessed portions (112) is from 1.00 times to 1.10 times the distance (p) between the centers of the plurality of recessed portions (112) which are adjacent.

Inventors:

YUASA AKIMASA (JP)
ESHIMA YOSHIYUKI (JP)
FUJIYOSHI DAIKI (JP)
KOBASHI SEIJI (JP)
NISHIMURA KOJI (JP)

Application Number:

PCT/JP2020/010913

Publication Date:

September 24, 2020

Filing Date:

March 12, 2020

Export Citation:

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Assignee:

DENKA COMPANY LTD (JP)

International Classes:

B28D5/00; B23K26/364; C04B41/91; H05K1/02; H05K3/00

Foreign References:

JP2000044344A	2000-02-15
JP2007324301A	2007-12-13
JP2004165226A	2004-06-10
JP2009049390A	2009-03-05
JP2015144197A	2015-08-06
JP2007324301A	2007-12-13
JP2013175667A	2013-09-05
JP2014042066A	2014-03-06
JP2019048079A	2019-03-28

Other References: