Title:
NITRIDE MATEIRAL, PIEZOELECTRIC BODY FORMED OF SAME, AND MEMS DEVICE, TRANSISTOR, INVERTER, TRANSDUCER, SAW DEVICE AND FERROELECTRIC MEMORY, EACH OF WHICH USES SAID PIEZOELECTRIC BODY
Document Type and Number:
WIPO Patent Application WO/2022/180961
Kind Code:
A1
Abstract:
[Problem] The purpose of the present invention is to provide aluminum nitride to which scandium having nitrogen polarity is added. [Solution] A nitride material which is represented by chemical formula ScXMYAl1-X-YN, and which is characterized in that: in the formula, M represents at least one element selected from among C, Si, Ge and Sn; X is more than 0 but not more than 0.4; Y is more than 0 but not more than 0.2; and X/Y is 5 or less. This nitride material has piezoelectricity in the polarization direction of nitrogen polarity which has a polarization direction that is opposite to the thin film growth direction.
Inventors:
ANGGRAINI SRI AYU (JP)
AKIYAMA MORITO (JP)
UEHARA MASATO (JP)
YAMADA HIROSHI (JP)
HIRATA KENJI (JP)
AKIYAMA MORITO (JP)
UEHARA MASATO (JP)
YAMADA HIROSHI (JP)
HIRATA KENJI (JP)
Application Number:
PCT/JP2021/042898
Publication Date:
September 01, 2022
Filing Date:
November 24, 2021
Export Citation:
Assignee:
AIST (JP)
International Classes:
H01L41/083; C23C14/06; H01L27/11507; H01L41/187; H03H9/25
Foreign References:
| JP2014236051A | 2014-12-15 | |||
| JP2013148562A | 2013-08-01 | |||
| JP2013128267A | 2013-06-27 | |||
| JP2017045749A | 2017-03-02 | |||
| JP2017045749A | 2017-03-02 | |||
| JP2009010926A | 2009-01-15 |
Other References:
MIZUNO, T ET AL.: "19th International Conference on Solid-State Sensors", ACTUATORS AND MICROSYSTEMS (TRANSDUCERS, 2017, pages 1891 - 1894
Attorney, Agent or Firm:
TAKAMATSU Takayuki et al. (JP)
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